CAJ | 학술논문

本文介绍了一种智能化激光荧光扫描光谱仪，可对大尺寸光致荧光样品进行扫描分析，从而获得需要的整体信息。进一步以发光二极管(LED)外延片为例，介绍仪器进行外延片在线无损检测的应用。该仪器可迅速对LED外延片进行在线检测，给出相关参数。实现智能化检测。
본문개소료일충지능화격광형광소묘광보의，가대대척촌광치형광양품진행소묘분석，종이획득수요적정체신식。진일보이발광이겁관(LED)외연편위례，개소의기진행외연편재선무손검측적응용。해의기가신속대LED외연편진행재선검측，급출상관삼수。실현지능화검측。
A new intelligent laser-induced fluorescence spectrometer was developed.Using the instrument,the large size semiconductor sample could be scanned spot by spot and the whole information about the fluorescence spectrum of sample was acquired immediately.All of these measurements were nondestructive.As an example,this instrument was used to detect the fluorescence property of eptiaxial layer of LED chip.The luminescent fluorescence images of 256×256 dots in two-inch chip can be acquired in the instrument.