CAJ | 학술논문

通过对TiN膜层上和膜层中微液滴的观测,探讨了微液滴对膜层和基底结合力产生的影响,并分析了划痕试验中微液滴破损和膜层剥落之间的关系.在丹普公司开发的AS700DTXB型计算机自动控制离子镀膜机上,通过调整镀膜工艺参数、控制微液滴的尺寸,明显改善了TiN膜层和基底(高速钢和模具钢)的结合力.采用不同的划痕仪检测临界载荷L_(c2)可以稳定在100 N,或者更高;分析和探讨了膜基结合力国内外不同的检测判据和规范.根据实际测量中的经验积累和结果分析,提出了对国内测量标准的修改意见.
통과대TiN막층상화막층중미액적적관측,탐토료미액적대막층화기저결합력산생적영향,병분석료화흔시험중미액적파손화막층박락지간적관계.재단보공사개발적AS700DTXB형계산궤자동공제리자도막궤상,통과조정도막공예삼수、공제미액적적척촌,명현개선료TiN막층화기저(고속강화모구강)적결합력.채용불동적화흔의검측림계재하L_(c2)가이은정재100 N,혹자경고;분석화탐토료막기결합력국내외불동적검측판거화규범.근거실제측량중적경험적루화결과분석,제출료대국내측량표준적수개의견.
Through observing of micro droplets on and inside TiN film, their effects on film and substrate adhesion are studied. Meanwhile, the relationship between micro droplet broken and flake peal off along scratch on the film is analyzed. With automation ion plating machine model AS700DTXB developed by ProChina Limited, through coating recipe modification to control micro droplet sizes, TiN film and substrate (high speed steel and mould steel) adhesion is to be clearly improved. Critical load (L_(c2)) can be stable at 100 N or higher with different scratch test instruments. In this paper different measurement criterions and norms of scratch test are studied. Based on the measurement practices and data analysisabove, a further modification on Chinese standard is proposed.