具有90nm调谐范围的1.3μm Si基MOEMS可调谐光滤波器
구유90nm조해범위적1.3μm Si기MOEMS가조해광려파기
1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm
  • 万方数据
    半导体学报 반도체학보
    CHINESE JOURNAL OF SEMICONDUCTORS
    2003年 11期 1140-1144 ,共5页

    左玉华%黄昌俊%成步文%蔡晓%毛容伟%李传波%罗丽萍%高俊华%白云霞%姜磊%马朝华%朱家廉%王良臣%余金中%王启明

    좌옥화%황창준%성보문%채효%모용위%리전파%라려평%고준화%백운하%강뢰%마조화%주가렴%왕량신%여금중%왕계명

    MOEMS%可调谐滤波器%Fabry-Perot%表面微机械技术 MOEMS%可調諧濾波器%Fabry-Perot%錶麵微機械技術
    MOEMS%가조해려파기%Fabry-Perot%표면미궤계기술
    MOEMS%Fabry-Perot%tunable filter%surface micromaching
    利用表面微机械技术,成功制作了1.3μm Si基MOEMS可调谐光滤波器.原型器件在50V的调谐电压下,调谐范围为90nm.该技术可以用于制作1.3μm Si基可调谐光探测器.
    이용표면미궤계기술,성공제작료1.3μm Si기MOEMS가조해광려파기.원형기건재50V적조해전압하,조해범위위90nm.해기술가이용우제작1.3μm Si기가조해광탐측기.
    Optical filters capable of single control parameter-based wide tuning are implemented and studied.A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90nm at 50V tuning voltage.The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band.
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