CAJ | 학술논문

谐振腔是MOEMS陀螺的关键器件,由于谐振腔具有相对失调特性,所以传统的调腔是以人工方式进行的.研究并提出了一种新型的可应用于微光机电(MOEMS)陀螺谐振腔的闭环调整方案,完成了基于机器视觉和PZT控制的闭环调整系统及调腔实验,得到了预期的效果,并进行了相关的分析.
해진강시MOEMS타라적관건기건,유우해진강구유상대실조특성,소이전통적조강시이인공방식진행적.연구병제출료일충신형적가응용우미광궤전(MOEMS)타라해진강적폐배조정방안,완성료기우궤기시각화PZT공제적폐배조정계통급조강실험,득도료예기적효과,병진행료상관적분석.
As the key element of MOEMS Gyroscope, the resonator has relative maladjustment character. It was adjusted manually in the past. A new scheme of closed-loop adjustment is put forward which can be applied in MOEMS gyroscope resonator. The closed-loop adjustment system and adjustment experiment are completed. The adjustment system is based on machine vision and PZT control. The result accords with the expectation.