CAJ | 학술논문

近年来，二维振镜激光扫描技术因其速度快、精度高、易于控制等特点，得到了越来越广泛的应用．但振镜扫描系统在扫描过程中，存在着固有扫描场的几何畸变，系统本身也存在着线性、非线性误差以及其他误差等，严重影响了振镜扫描系统在不同应用领域的扫描质量。从理论推导出发，较为详细地分析了物镜前扫描和物镜后扫描两种方式存在的几何畸变以及各种误差，并提出了针对性的补偿方法。在对各种误差理论分析的基础上，对校正思路进行了展望，提出了一些看法和建议。
근년래，이유진경격광소묘기술인기속도쾌、정도고、역우공제등특점，득도료월래월엄범적응용．단진경소묘계통재소묘과정중，존재착고유소묘장적궤하기변，계통본신야존재착선성、비선성오차이급기타오차등，엄중영향료진경소묘계통재불동응용영역적소묘질량。종이론추도출발，교위상세지분석료물경전소묘화물경후소묘량충방식존재적궤하기변이급각충오차，병제출료침대성적보상방법。재대각충오차이론분석적기출상，대교정사로진행료전망，제출료일사간법화건의。
The two-dimensional laser galvanometer technology is widely used for the characters of high speed, high precision and good controllability. Due to the intrinsic geometric distortion on the scanning field, and linear, nonlinear and other errors of the system, the scanning quality of the laser galvanometer system is seriously affected in different application fields. The geometric distortion and various errors are profoundly analyzed about the pre-object and post-object scanning models, and the pertinence compensation methods are advanced too. Some views and suggestions are put forward, the correction methods are also conceived on the basis of the theoretical analysis about various errors.