CAJ | 학술논문

采用溶剂蒸发对流自组装法将单分散二氧化硅(SiO2)微球组装形成三维有序胶体晶体模板,以锗烷(GeH4)为先驱体气用等离子增强化学气相沉积法在350℃填充高折射率材料锗.获得了锗反蛋白石光子晶体.通过扫描电镜、X射线衍射仪对锗反蛋白石的形貌、成分、结构进行了表征.结果表明:锗在SiO2微球空隙内填充均匀,得到的锗为多晶态.锗反蛋白石光子晶体为三维有序多孔结构.等离子体增强化学气相沉积的潜在优势在于可实现材料的低温填充,从而以高分子材料为模板进行复型,得到多种结构的三维光子晶体.
채용용제증발대류자조장법장단분산이양화규(SiO2)미구조장형성삼유유서효체정체모판,이타완(GeH4)위선구체기용등리자증강화학기상침적법재350℃전충고절사솔재료타.획득료타반단백석광자정체.통과소묘전경、X사선연사의대타반단백석적형모、성분、결구진행료표정.결과표명:타재SiO2미구공극내전충균균,득도적타위다정태.타반단백석광자정체위삼유유서다공결구.등리자체증강화학기상침적적잠재우세재우가실현재료적저온전충,종이이고분자재료위모판진행복형,득도다충결구적삼유광자정체.
Monodisperse silica microspheres were assembled into a three-dimensional colloidal crystal template with long-range order by the solvent vaporization convection self-assembly method. Using GeH4 as the precursor gas, the plasma enhanced chemical vapor deposition method was then used to fill the voids of the silica colloidal crystal template with high refractive index germanium, and germanium inverse opal photonic crystal was obtained. The modality, components and structure of the resulting samples were charac-terized by scanning electron microscope and X-ray diffraction. The results show that germanium is homogeneously distributed inside the voids of the silica template. Its crystalline state is polycrystalline. Germanium inverse opal exhibits a three-dimensional ordered porous structure. The potential advantage of plasma enhanced chemical vapor deposition is that it can fill materials at lower tempera-ture, so by this method, macromolecule materials can be used as templates, and thus, the three-dimensional photonic crystal with more kinds of structures can be obtained.