CAJ | 학술논문

采用直流磁控反溅射法在不锈钢真空管道内表面均匀镀上一层TiZrV薄膜.该薄膜经过激活后具有抽气效应,能够使真空管道由原来的系统气载转变成为管道泵.该薄膜激活温度很低,最低激活温度为180℃.在经过激活后,实验装置远端的真空度与泵口真空度相同,因此压力分布呈直线型.
채용직류자공반천사법재불수강진공관도내표면균균도상일층TiZrV박막.해박막경과격활후구유추기효응,능구사진공관도유원래적계통기재전변성위관도빙.해박막격활온도흔저,최저격활온도위180℃.재경과격활후,실험장치원단적진공도여빙구진공도상동,인차압력분포정직선형.
A novel technique was developed to turn the gas-load of the long,narrow stainless-steel pipes in vacuum system into non-evaporation getters (NEG).In the technique,the TiZrV films were grown by DC reactive magnetron sputtering on the inner walls of the pipes.The microstructures and compositions of the TiZrV coatings were characterized with scanning electron microscopy (SEM).The impacts of the activation conditions,including the activation temperature and time,on the gettering characteristics were studied.The results show that the TiZrV film,after activation at a lowest temperature of 180℃,is capable of gettering.The pressures at the remote end of the experimental setup and the pump inlet were found to be almost the same with a linear pressure distribution.