红外与激光工程
紅外與激光工程
홍외여격광공정
INFRARED AND LASER ENGINEERING
2010年
2期
213-217,235
,共6页
胡大鹏%郭方敏%朱晟伟%熊大元
鬍大鵬%郭方敏%硃晟偉%熊大元
호대붕%곽방민%주성위%웅대원
SAGCM-APD%雪崩光电探测器%倍增增益%电流响应%仿真分析
SAGCM-APD%雪崩光電探測器%倍增增益%電流響應%倣真分析
SAGCM-APD%설붕광전탐측기%배증증익%전류향응%방진분석
SAGCM-APD%APD%Multiplication gain%Current response%Simulation analysis
应用二维漂移扩散模型研究具有分立吸收层、渐变层、电荷层和倍增层结构(SAGCM)的InGaAsP-InP雪崩光电探测器(APD),仿真分析了不同电荷层、倍增层厚度和掺杂浓度对电场分布、电流响应及击穿电压的影响,特别是参数变量对增益计算模型的影响,载流子传输过程的时间依赖关系和倍增层中所处位置的影响,仿真结果表明:较高掺杂浓度和较薄电荷层结构可以改变器件内部的电场分布,进而提高增益值.当入射光波长为1.55μm,光功率为500 W/m2时,光电流响应量级在10-2A;阈值电压降低到10V以下,击穿电压为42.6V时,器件倍增增益值大于100.
應用二維漂移擴散模型研究具有分立吸收層、漸變層、電荷層和倍增層結構(SAGCM)的InGaAsP-InP雪崩光電探測器(APD),倣真分析瞭不同電荷層、倍增層厚度和摻雜濃度對電場分佈、電流響應及擊穿電壓的影響,特彆是參數變量對增益計算模型的影響,載流子傳輸過程的時間依賴關繫和倍增層中所處位置的影響,倣真結果錶明:較高摻雜濃度和較薄電荷層結構可以改變器件內部的電場分佈,進而提高增益值.噹入射光波長為1.55μm,光功率為500 W/m2時,光電流響應量級在10-2A;閾值電壓降低到10V以下,擊穿電壓為42.6V時,器件倍增增益值大于100.
응용이유표이확산모형연구구유분립흡수층、점변층、전하층화배증층결구(SAGCM)적InGaAsP-InP설붕광전탐측기(APD),방진분석료불동전하층、배증층후도화참잡농도대전장분포、전류향응급격천전압적영향,특별시삼수변량대증익계산모형적영향,재류자전수과정적시간의뢰관계화배증층중소처위치적영향,방진결과표명:교고참잡농도화교박전하층결구가이개변기건내부적전장분포,진이제고증익치.당입사광파장위1.55μm,광공솔위500 W/m2시,광전류향응량급재10-2A;역치전압강저도10V이하,격천전압위42.6V시,기건배증증익치대우100.
The avalanche photodiode(APD),which was comprised of separate layer of absorption,grading,charge and multiplication(SAGCM)had been studied,and the impact of gain parameter was presented in detail by two-dimensional drift diffusion model.The influence of different thicknesses and doping concentration of both the charge and multiplication layers on electric field distribution,current-voltage characteristic and breakdown voltage were simulated and analyzed,especially the impact of parameters on gain calculation model,influences of the carders VS.time in transfer process and in the position of multiplication layer.Simulation results show that when threshold voltage drops to 10 V and breakdown voltage is about 42.6 V,the device still has a good multiplication gain.The result further shows the better electrical field distribution and current response can be achieved with higher doping concentration and thinner charge layer,which Can improve the multiplication gain.