功能材料与器件学报
功能材料與器件學報
공능재료여기건학보
JOURNAL OF FUNCTIONAL MATERIALS AND DEVICES
2009年
4期
409-413
,共5页
氧化锌薄膜%感应耦合等离子磁控溅射%界面研究
氧化鋅薄膜%感應耦閤等離子磁控濺射%界麵研究
양화자박막%감응우합등리자자공천사%계면연구
ZnO film%ICP-assisted magnetron sputtering%Interface Study
结界面.
結界麵.
결계면.
uctures of the film were investigated by X-ray dif-and transmittance of about 80% in the visible range was prepared under the conditions of 4 mTorr working pressure, 300W RF power, 30W DC power.
