CAJ | 학술논문

研究了一种具有广泛适应性的微机械制造方法,该方法可用于制备各种不同的器件,包括硅微陀螺仪、加速度计、剪切应力传感器以及光开关等.利用该方法,制备了硅微陀螺仪,并给出了所制备的硅微陀螺仪的性能测试结果,同时分析了利用该制备方法制备各种不同器件时,工艺流程对器件性能的影响,重点讨论了硅-玻璃阳极键合、减薄工艺以及深刻蚀所形成的侧壁质量,包括侧壁垂直度、侧壁杂质等因素对器件性能的影响.
연구료일충구유엄범괄응성적미궤계제조방법,해방법가용우제비각충불동적기건,포괄규미타라의、가속도계、전절응력전감기이급광개관등.이용해방법,제비료규미타라의,병급출료소제비적규미타라의적성능측시결과,동시분석료이용해제비방법제비각충불동기건시,공예류정대기건성능적영향,중점토론료규-파리양겁건합、감박공예이급심각식소형성적측벽질량,포괄측벽수직도、측벽잡질등인소대기건성능적영향.
A flexible micromachined fabrication method is studied. This method can be used to fabricate a variety of devices ranging from gyroscopes, accelerometers, shear stress sensor to optical switches. Then the method was employed to fabricate MEMS gyroscope. Finally, the test results of the micro fabricated gyroscope are presented. It shows that the improvement on fabrication has an important effect on the performance of gyroscope. The effect of fabrication process on the performance of devices fabricated by this method is analyzed and attention is focused on the effect of the silicon-glass anodic bonding, thinning process and the quality of sidewall formed by deep etching, including the sidewall profile and impurity deposited on the sidewall during deep etching on the performance of devices.