光学学报
光學學報
광학학보
ACTA OPTICA SINICA
2009年
10期
2804-2807
,共4页
吴高峰%陈强%侯溪%范斌
吳高峰%陳彊%侯溪%範斌
오고봉%진강%후계%범빈
干涉测量术%非球面检测%像差%顶点半径%二次常数
榦涉測量術%非毬麵檢測%像差%頂點半徑%二次常數
간섭측량술%비구면검측%상차%정점반경%이차상수
interferometry%aspheric measurement%aberration%vertex radius%conic constant
非球面顶点半径和二次常数干涉测量是对二次曲面离轴子孔径在弧矢、子午和中间焦点位置直接干涉测量,拟合得到初级像差系数,并结合化置差计算出顶点曲率半径和二次常数.详细介绍了该方法的基本原理,在此基础上将子孔径中心法线与光轴夹角分解为两个倾角分量α和β引入,改进了现有模型.提出在子孔径对称情况下,可通过调整、控制特定项的泽尼克系数值,消除β分量.进而对新的模型进行了简化,只考虑α分量的影响,给出了仅存在该分量时的非球面顶点半径和二次常数的计算公式,编写了仿真程序.在α=0.03 °,β=0时.直径100 mm,F数为3的抛物面反射镜离轴子孔径的初级像差系数的理论计算和数值仿真结果最大偏差仅为0.0002 λ.研究表明:在子孔径中心法线与光轴的调整存在一定误差时,在弧矢、子午和中间焦点处的初级像差系数特征关系仍然成立.
非毬麵頂點半徑和二次常數榦涉測量是對二次麯麵離軸子孔徑在弧矢、子午和中間焦點位置直接榦涉測量,擬閤得到初級像差繫數,併結閤化置差計算齣頂點麯率半徑和二次常數.詳細介紹瞭該方法的基本原理,在此基礎上將子孔徑中心法線與光軸夾角分解為兩箇傾角分量α和β引入,改進瞭現有模型.提齣在子孔徑對稱情況下,可通過調整、控製特定項的澤尼剋繫數值,消除β分量.進而對新的模型進行瞭簡化,隻攷慮α分量的影響,給齣瞭僅存在該分量時的非毬麵頂點半徑和二次常數的計算公式,編寫瞭倣真程序.在α=0.03 °,β=0時.直徑100 mm,F數為3的拋物麵反射鏡離軸子孔徑的初級像差繫數的理論計算和數值倣真結果最大偏差僅為0.0002 λ.研究錶明:在子孔徑中心法線與光軸的調整存在一定誤差時,在弧矢、子午和中間焦點處的初級像差繫數特徵關繫仍然成立.
비구면정점반경화이차상수간섭측량시대이차곡면리축자공경재호시、자오화중간초점위치직접간섭측량,의합득도초급상차계수,병결합화치차계산출정점곡솔반경화이차상수.상세개소료해방법적기본원리,재차기출상장자공경중심법선여광축협각분해위량개경각분량α화β인입,개진료현유모형.제출재자공경대칭정황하,가통과조정、공제특정항적택니극계수치,소제β분량.진이대신적모형진행료간화,지고필α분량적영향,급출료부존재해분량시적비구면정점반경화이차상수적계산공식,편사료방진정서.재α=0.03 °,β=0시.직경100 mm,F수위3적포물면반사경리축자공경적초급상차계수적이론계산화수치방진결과최대편차부위0.0002 λ.연구표명:재자공경중심법선여광축적조정존재일정오차시,재호시、자오화중간초점처적초급상차계수특정관계잉연성립.
Interferometric testing the vertex radius of curvature (ROC) and conic constant (CC) of a conic surface is calculating the radius and CC with radii difference and Seidel coefficients obtained by comparing the test surface with a spherical reference wavefront having a ROC equal to the local sagittal, medial, or tangential ROC. The method is explained in detail and the angle of the optical axis and normal of the conic segment is introduced and divided into two angles α and β to improve the mathematical model. Angle β can be removed because of the symmetry of the segment according to the specific Zernike coefficients to simplify the new model. Equations about the vertex ROC and CC are derived with α and the simulation program is compiled. The maximum Seidel coefficients diffidence between theoretical calculation and simulations of a paraboloidal (φ=100 mm, F = 3) is 0.0002 λ when α is 0.03° and β is 0. The research indicates that there are the same characteristic relations of the Seidel coefficients at the three positions even with the angle α.