计量学报
計量學報
계량학보
ACTA METROLOGICA SINICA
2009年
z1期
160-163
,共4页
王为农%裴丽梅%任国营%夏阳
王為農%裴麗梅%任國營%夏暘
왕위농%배려매%임국영%하양
计量学%校准装置%步距规%坐标测量机%激光干涉仪
計量學%校準裝置%步距規%坐標測量機%激光榦涉儀
계량학%교준장치%보거규%좌표측량궤%격광간섭의
Metrology%Measurement system%Step gauge%Coordinate measuring machine%Laser interferometer
利用坐标测量机和激光干涉仪的信号合成技术,构成步距规校准装置,实现多示值标准器的高精度校准.介绍了仪器的构成、原理、软件框图等,并进行了详细的不确定度分析.
利用坐標測量機和激光榦涉儀的信號閤成技術,構成步距規校準裝置,實現多示值標準器的高精度校準.介紹瞭儀器的構成、原理、軟件框圖等,併進行瞭詳細的不確定度分析.
이용좌표측량궤화격광간섭의적신호합성기술,구성보거규교준장치,실현다시치표준기적고정도교준.개소료의기적구성、원리、연건광도등,병진행료상세적불학정도분석.
Combining coordinate measuring machine (CMM) with laser interferometer, a calibration system for step gauge is developed. It can provide calibration service for multi-size standard with high accuracy. The structure, principle and schematic diagram of the software are described, and the uncertainty analysis of the system is presented.
