CAJ | 학술논문

研究了一种新型的微机电混合陀螺仪,它既具有实现传统动力调谐陀螺仪较高精度的潜力,又具有硅微陀螺仪体积小、价格低等优点.研究了该陀螺接口电路,推导了该接口信号灵敏度公式,分析表明增加检测电容C_t和C_b或者减小寄生电容C_p都可以提高信号灵敏度.同时,还推导了力矩器的力矩传递系数和信号器的电容信号传递系数公式,分析表明减小电容间距d和内环半径R_1 或者增加外环半径R_2都可以提高电容信号器灵敏度.提出一种利用力矩器负刚度效应对微机电混合陀螺进行调谐的方法,并研究了全解耦闭环反馈控制电路.开环仿真表明,残余刚度将导致转子自转轴进动,而调谐后转子自转轴能保持原方位稳定.闭环仿真表明,研究的全解耦闭环反馈控制电路是可行的.
연구료일충신형적미궤전혼합타라의,타기구유실현전통동력조해타라의교고정도적잠력,우구유규미타라의체적소、개격저등우점.연구료해타라접구전로,추도료해접구신호령민도공식,분석표명증가검측전용C_t화C_b혹자감소기생전용C_p도가이제고신호령민도.동시,환추도료력구기적력구전체계수화신호기적전용신호전체계수공식,분석표명감소전용간거d화내배반경R_1 혹자증가외배반경R_2도가이제고전용신호기령민도.제출일충이용력구기부강도효응대미궤전혼합타라진행조해적방법,병연구료전해우폐배반궤공제전로.개배방진표명,잔여강도장도치전자자전축진동,이조해후전자자전축능보지원방위은정.폐배방진표명,연구적전해우폐배반궤공제전로시가행적.
Described in this paper is a microelectromechanical hybrid gyroscope with advantages not only in the potentiality of achieving high precision like the traditional dynamically tuned gyroscope (DTG) , but also in small size and low cost like the Silicon Micromachined Gyroscope(SMG). An interface circuit is researched, the sensitivity equation of the interface circuit is deduced. The analysis shows that the signal sensitivity can be improved by increasing the sense capacitances C_t and C_b or decreasing the parasitical capacitance C_p. The transfer coefficients of the moment and signaler are derived. The analysis shows that the sensitivity of capacitance signal transducer can be improved by decreasing the capacitance gap d and inner ring radius R_1l or increasing the external ring radius R_2. A new tuned method which tunes the microelectromechanical hybrid gyroscope by negative stiffness effectiveness of the moment is adopted and a decouple closed-loop feedback control circuit is researched. The open-loop simulation shows that the residual stiffness will lead to the precessional motion of the axis of rotation of microelectromechanical hybrid gyroscope. However, when the residual stiffness is revised, the axis of rotation of microelectromechanical hybrid gyroscope will maintain o-riginal orientation. The closed-loop simulation shows that the decouple closed-loop feedback control circuit is feasible.