半导体技术
半導體技術
반도체기술
SEMICONDUCTOR TECHNOLOGY
2009年
11期
1135-1139
,共5页
曾传滨%海潮和%李多力%韩郑生
曾傳濱%海潮和%李多力%韓鄭生
증전빈%해조화%리다력%한정생
金属氧化物半导体%绝缘体上硅%闩锁%敏感区域%栅极触发%临界下降沿
金屬氧化物半導體%絕緣體上硅%閂鎖%敏感區域%柵極觸髮%臨界下降沿
금속양화물반도체%절연체상규%산쇄%민감구역%책겁촉발%림계하강연
MOS%SOI%latch%sensitive region%gate trigger%critical fail time
测试了不同静态栅极触发电压(输入电压)下诱发CMOS闩锁效应需要的电源电压和输出电压(即将闩锁时的输出电压),发现静态栅极触发CMOS闩锁效应存在触发电流限制和维持电压限制两种闩锁触发限制模式,并且此栅极触发电压.输出电压曲线是动态栅极触发CMOS闩锁效应敏感区域与非敏感区域的分界线.通过改变输出端负载电容,测试出了不同电源电压下CMOS闩锁效应需要的栅极触发电压临界下降沿,并拟合出了0 pF负载电容时的临界下降沿,最终得出了PDSOI CMOS电路存在的CMOS闩锁效应很难通过电学方法测试出来的结论.
測試瞭不同靜態柵極觸髮電壓(輸入電壓)下誘髮CMOS閂鎖效應需要的電源電壓和輸齣電壓(即將閂鎖時的輸齣電壓),髮現靜態柵極觸髮CMOS閂鎖效應存在觸髮電流限製和維持電壓限製兩種閂鎖觸髮限製模式,併且此柵極觸髮電壓.輸齣電壓麯線是動態柵極觸髮CMOS閂鎖效應敏感區域與非敏感區域的分界線.通過改變輸齣耑負載電容,測試齣瞭不同電源電壓下CMOS閂鎖效應需要的柵極觸髮電壓臨界下降沿,併擬閤齣瞭0 pF負載電容時的臨界下降沿,最終得齣瞭PDSOI CMOS電路存在的CMOS閂鎖效應很難通過電學方法測試齣來的結論.
측시료불동정태책겁촉발전압(수입전압)하유발CMOS산쇄효응수요적전원전압화수출전압(즉장산쇄시적수출전압),발현정태책겁촉발CMOS산쇄효응존재촉발전류한제화유지전압한제량충산쇄촉발한제모식,병차차책겁촉발전압.수출전압곡선시동태책겁촉발CMOS산쇄효응민감구역여비민감구역적분계선.통과개변수출단부재전용,측시출료불동전원전압하CMOS산쇄효응수요적책겁촉발전압림계하강연,병의합출료0 pF부재전용시적림계하강연,최종득출료PDSOI CMOS전로존재적CMOS산쇄효응흔난통과전학방법측시출래적결론.
The supply voltage and output voltage (output voltage just before latch) of CMOS latch effect under different static gate trigger voltage (input voltage) are measured. It is found that there exist two modes of latch limiting condition, the trigger current limit mode and holding voltage limit mode. Besides, the static gate trigger voltage-output voltage curve is the dividing line between the sensitive region and insensitive region of dynamic gate trigger CMOS latch effect. The dynamic gate trigger voltage critical fall time for triggering CMOS latch effect under different supply voltage was tested by changing the output capacitor load and fitted the critical fall time under 0 pF output capacitor load. Finally, it reveals that the CMOS latch effect in PDSOI CMOS circuit is difficult to test by normal electrical method.