CAJ | 학술논문

飞秒激光掩模版加工和修复是近几年来微纳加工领域的研究热点之一,其中精度控制是获得高质量掩模版的关键.在飞秒激光脉冲对铬金属膜和石英基底材料破坏特性的理论基础上,利用一套输出脉宽25fs、最大功率1 W、中心波长800 nm、重复频率1 kHz的飞秒脉冲激光系统,实验研究了掩模特征单元尺寸与激光能量密度、扫描速度的关系,通过参数优化实现了最小特征尺寸为290 nm的掩模版加工;探讨了特征单元的边缘形貌和底部形貌受能量密度与扫描次数的影响规律,提出了加工参数的选取原则,最终实现了飞秒激光掩模版加工的精度控制和优化.
비초격광엄모판가공화수복시근궤년래미납가공영역적연구열점지일,기중정도공제시획득고질량엄모판적관건.재비초격광맥충대락금속막화석영기저재료파배특성적이론기출상,이용일투수출맥관25fs、최대공솔1 W、중심파장800 nm、중복빈솔1 kHz적비초맥충격광계통,실험연구료엄모특정단원척촌여격광능량밀도、소묘속도적관계,통과삼수우화실현료최소특정척촌위290 nm적엄모판가공;탐토료특정단원적변연형모화저부형모수능량밀도여소묘차수적영향규률,제출료가공삼수적선취원칙,최종실현료비초격광엄모판가공적정도공제화우화.
Femtosecond laser mask fabrication and repair is a research focus in micro-and nano-manufacturing field,precision control is the key to obtain high quafity mask.Precision control methods for the femtosecond laser fabrication of mask were proposed.On the basis of the theoretical researches on the damage characteristics of femtosecond laser pulse on the chromium film and the fused silica,a femtosecond pulsed laser system with the output pulse width of 25 fs,the maximum power of 1 W,the central wavelength of 800 nm and the repetition rate of 1 kHz was adopted in experiments.The relationships among the feature size of micro-structure,laser energy density,and scan speed were studied,and a mask with the critical dimension of 290 nm was fabricated with the optimized processing parameters.Furthermore,the effects of energy density and scan times on the edge and bottom morphologies of micro-structures were discussed,and some important principles for selecting the processing parameters were proposed to realize precision control and optimization of mask quafity.