CAJ | 학술논문

介绍了Lucovsky方程及稳态情况下PSD的位置测量公式.以两面型PSD为例,给出了在极短脉冲光照下,基于PSD稳态公式的测量效果位置网格图.针对存在的误差较大问题,提出了一种积分测量方法,并给出了极短脉冲光照下,基于积分检测法的位置网格图.从图中可以看到,采用积分方法进行PSD位置测量具有很高的精度.
개소료Lucovsky방정급은태정황하PSD적위치측량공식.이량면형PSD위례,급출료재겁단맥충광조하,기우PSD은태공식적측량효과위치망격도.침대존재적오차교대문제,제출료일충적분측량방법,병급출료겁단맥충광조하,기우적분검측법적위치망격도.종도중가이간도,채용적분방법진행PSD위치측량구유흔고적정도.
The Lucovsky equation and the position detecting formulation of PSD under stable situation are briefly introduced. With the instance of Duo-lateral PSD,a position detecting effect gridding chart of PSD based on the stable situation formulation and under the excitation of very-short-pulse illumination is showed. Pointing to the problem of a bad linearity,an integral detecting method is worked out. And the position detection effect gridding chart based on this method and under the excitation of very-short-pulse illumination is showed too. From the chart we can obviously see that it provides a very high precise to adopt the integral method on the PSD detection.