CAJ | 학술논문

厚膜电容式压力敏感芯片具有工作温度范围宽、耐腐蚀、抗过载能力强、蠕变和迟滞小等优点.该芯片是由2块能牢固键合成一体的上下基板组成,基板材料为96% Al_2O_3陶瓷.下基板既为弹性体,又为电容器的可动电极; 上基板为电容器的固定电极并可承载运放、信号调节电路.文中研制的压力敏感芯片量程为0～100 kPa,电容值为30 pF,非线性为1.5%,工作温度为-40～125 ℃,零点温漂小于200 ppm/℃.
후막전용식압력민감심편구유공작온도범위관、내부식、항과재능력강、연변화지체소등우점.해심편시유2괴능뢰고건합성일체적상하기판조성,기판재료위96% Al_2O_3도자.하기판기위탄성체,우위전용기적가동전겁; 상기판위전용기적고정전겁병가승재운방、신호조절전로.문중연제적압력민감심편량정위0～100 kPa,전용치위30 pF,비선성위1.5%,공작온도위-40～125 ℃,영점온표소우200 ppm/℃.
Thick-film capacitive pressure-sensitive chip has many advantages, such as wide operation temperature range, corrosion-resisting, strong anti-overload ability, and the slow hysteresis. It is especially suitable for measurement of oil tank liquid level. The chips comprised of two substrates synthesized into one firmly, this substrate is made of 96% Al_2O_3. The below substrate both elastomers, but also movable electrode of capacitor; the above one is a fixed electrode which can bear operational amplifier and signal conditioning circuit. and pressure range from 0 to 100 kPa, the capacitive is about 30 pF, accurate to 1.5% linearity , and operation temperature is -40 ℃ to +125 ℃ , zero thermal shift is less than 200 ppm/ ℃.