光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2008年
12期
2366-2370
,共5页
压电驱动器%振动模态%棒板结合%有限元法
壓電驅動器%振動模態%棒闆結閤%有限元法
압전구동기%진동모태%봉판결합%유한원법
piezoelectric actuator%vibration mode%disk-pivot%Finite Element Method(FEM)
设计制作了一种采用双晶片压电陶瓷结构的棒板结合式压电驱动器.和瓷片分别粘接在青铜定子的上下两侧.定子上的金属圆柱体被用来放大振动的横向位移,并对金属棒状的转子进行激振,使其旋转.利用有限元分析(FEA)对定子进行了分析,发现在同样的驱动模式下,与传统的单片陶瓷片驱动器相比,该驱动器可以提供更多的横向和纵向的振动位移,大约提高25%左右.这种新结构也可避免不同振动模式之间的模态耦合现象,并产生理想的振动模态,以提高驱动器的运行稳定性.实验表明,驱动器在25 Vo-p低电压下可以提供512r/rain的转速,而单片陶瓷驱动器在该电压下不能工作.这种压电驱动器可以经过优化和调整来满足不同的实际应用,如精确定位仪器,生物工程和光聚焦系统等.
設計製作瞭一種採用雙晶片壓電陶瓷結構的棒闆結閤式壓電驅動器.和瓷片分彆粘接在青銅定子的上下兩側.定子上的金屬圓柱體被用來放大振動的橫嚮位移,併對金屬棒狀的轉子進行激振,使其鏇轉.利用有限元分析(FEA)對定子進行瞭分析,髮現在同樣的驅動模式下,與傳統的單片陶瓷片驅動器相比,該驅動器可以提供更多的橫嚮和縱嚮的振動位移,大約提高25%左右.這種新結構也可避免不同振動模式之間的模態耦閤現象,併產生理想的振動模態,以提高驅動器的運行穩定性.實驗錶明,驅動器在25 Vo-p低電壓下可以提供512r/rain的轉速,而單片陶瓷驅動器在該電壓下不能工作.這種壓電驅動器可以經過優化和調整來滿足不同的實際應用,如精確定位儀器,生物工程和光聚焦繫統等.
설계제작료일충채용쌍정편압전도자결구적봉판결합식압전구동기.화자편분별점접재청동정자적상하량측.정자상적금속원주체피용래방대진동적횡향위이,병대금속봉상적전자진행격진,사기선전.이용유한원분석(FEA)대정자진행료분석,발현재동양적구동모식하,여전통적단편도자편구동기상비,해구동기가이제공경다적횡향화종향적진동위이,대약제고25%좌우.저충신결구야가피면불동진동모식지간적모태우합현상,병산생이상적진동모태,이제고구동기적운행은정성.실험표명,구동기재25 Vo-p저전압하가이제공512r/rain적전속,이단편도자구동기재해전압하불능공작.저충압전구동기가이경과우화화조정래만족불동적실제응용,여정학정위의기,생물공정화광취초계통등.
A disk-pivot structure micro piezoelectric actuator with bimorph is designed.Different from the piezoelectric actuators described in reference papers,two piezoelectric discs in the actuator are bonded on the both sides of the bronze stator.The metal cylinder on the stator is used to amplify the transverse displacement and to actuate the metal rod rotor to rotate.The stator is analysed using Finite Element Analysis(FEA),the results show that the actuator can provide more transverse and vertical displacements than the previous prototype with only one ceramic disc under the same driving and boundary conditions,the improvements can be nearly 25%.This new structure can also avoid the coupling phenomena between different vibration modes and generate identical modal shape to enhance the stability of the actuator.Experiments illustrate that under the driving voltage 25 Vo-p,the actuator with only one ceramic disc can not run and the actuator with bimorph structure still has a speed of 512r/min.Such piezoelectric actuator can be optimized and adj usted to satisfy different practical applications,such as precise positioning instrument,bioengineering and optical foCUS system,etc..