CAJ | 학술논문

利用微电子机械加工技术成功地研制出电热激励、压阻拾振的高精度硅谐振梁式压力传感器。传感器的谐振器的品质因素Q值在真空中大于10?000。采用特殊闭环自激振荡方式测定压力传感器的压力特性，压力测试范围0～400?kPa，线性相关系数0.999?9，测试精度优于0.1%FS。
이용미전자궤계가공기술성공지연제출전열격려、압조습진적고정도규해진량식압력전감기。전감기적해진기적품질인소Q치재진공중대우10?000。채용특수폐배자격진탕방식측정압력전감기적압력특성，압력측시범위0～400?kPa，선성상관계수0.999?9，측시정도우우0.1%FS。
A thermally excited and piezo-resistor detected silicon resonant pressure sensor of high accuracy has been developed by microelectronic mechanical system(MEMS) technology. The resonator of the sensor has a high quality factor of more than 10000 in vacuum. With a special close-loop self-excited method, the pressure sensor is characterized. The sensitivity is 12.2?Hz/kPa over a range of 0～400?kPa with a linear correlation coefficient of 0.999?9. The overall accuracy is better than 0.1%.