CAJ | 학술논문

采用反应蒸镀法镀制了单层HfO2薄膜，观察了薄膜表面主要的微结构缺陷，研究了基片清洗工艺对薄膜损伤阈值的影响。测量了薄膜沉积前后表面粗糙度变化。结果表明：沉积工艺可以改变粗糙度，并对薄膜抗激光损伤能力有较大的影响。
채용반응증도법도제료단층HfO2박막，관찰료박막표면주요적미결구결함，연구료기편청세공예대박막손상역치적영향。측량료박막침적전후표면조조도변화。결과표명：침적공예가이개변조조도，병대박막항격광손상능력유교대적영향。
A series of films were prepared by reactive evaporation. Themicrostructure defects on film surfaces and effect of substrate cleaning procedures on laser induced damage threshold were investigated. The RMS surface roughness of uncoated and coated substrates were measured. It was shown that the coating process could increase or decrease the surface roughness and had obvious effects on damage threshold．