物理化学学报
物理化學學報
물이화학학보
ACTA PHYSICO-CHIMICA SINICA
2011年
12期
2821-2825
,共5页
史成武%陈柱%史高杨%孙人杰
史成武%陳柱%史高楊%孫人傑
사성무%진주%사고양%손인걸
CdS薄膜%超声搅拌%化学浴沉积%沉积时间%退火%CdCl2处理
CdS薄膜%超聲攪拌%化學浴沉積%沉積時間%退火%CdCl2處理
CdS박막%초성교반%화학욕침적%침적시간%퇴화%CdCl2처리
CdS thin film%Ultrasonic agitation%Chemical bath deposition%Deposition time%Annealing%CdCl2-treatment
采用超声搅拌化学浴法(UCBD)在SnO2:F 透明导电玻璃衬底上制备了CdS薄膜.研究了退火和CdCl2处理对UCBD-CdS薄膜的表面形貌、晶体结构和直接带隙的影响,比较了沉积时间对UCBD-CdS薄膜中CdS聚集体颗粒大小和堆积致密性的影响.结果表明,CdCl2处理可使CdS聚集体中的小颗粒重新熔合在一起,但CdS聚集体的大小并没有改变.在UCBD-CdS薄膜的沉积过程中,CdS薄膜的横向和纵向生长速率之比会随着沉积时间的不同而改变,且沉积时间是获得大颗粒的CdS聚集体和致密的UCBD-CdS薄膜的重要影响因素.当沉积时间为40 min 时,获得的UCBD-CdS薄膜较致密,CdS聚集体的大小为180 nm,膜厚为80.8 nm,适合作为薄膜太阳电池的窗口层.
採用超聲攪拌化學浴法(UCBD)在SnO2:F 透明導電玻璃襯底上製備瞭CdS薄膜.研究瞭退火和CdCl2處理對UCBD-CdS薄膜的錶麵形貌、晶體結構和直接帶隙的影響,比較瞭沉積時間對UCBD-CdS薄膜中CdS聚集體顆粒大小和堆積緻密性的影響.結果錶明,CdCl2處理可使CdS聚集體中的小顆粒重新鎔閤在一起,但CdS聚集體的大小併沒有改變.在UCBD-CdS薄膜的沉積過程中,CdS薄膜的橫嚮和縱嚮生長速率之比會隨著沉積時間的不同而改變,且沉積時間是穫得大顆粒的CdS聚集體和緻密的UCBD-CdS薄膜的重要影響因素.噹沉積時間為40 min 時,穫得的UCBD-CdS薄膜較緻密,CdS聚集體的大小為180 nm,膜厚為80.8 nm,適閤作為薄膜太暘電池的窗口層.
채용초성교반화학욕법(UCBD)재SnO2:F 투명도전파리츤저상제비료CdS박막.연구료퇴화화CdCl2처리대UCBD-CdS박막적표면형모、정체결구화직접대극적영향,비교료침적시간대UCBD-CdS박막중CdS취집체과립대소화퇴적치밀성적영향.결과표명,CdCl2처리가사CdS취집체중적소과립중신용합재일기,단CdS취집체적대소병몰유개변.재UCBD-CdS박막적침적과정중,CdS박막적횡향화종향생장속솔지비회수착침적시간적불동이개변,차침적시간시획득대과립적CdS취집체화치밀적UCBD-CdS박막적중요영향인소.당침적시간위40 min 시,획득적UCBD-CdS박막교치밀,CdS취집체적대소위180 nm,막후위80.8 nm,괄합작위박막태양전지적창구층.
We deposited CdS thin films onto F-doped SnO2 transparent conductive glass by ultrasonicagitation chemical bath deposition (UCBD). The influence of the annealing and CdCl2-treatment on thesurface morphology, crystal structure, and direct band gap of the UCBD-CdS thin films was investigated.The effect of deposition time on the grain size of the CdS aggregates and the stack denseness of theUCBD-CdS thin films was compared. The results reveal that the small grains in the CdS aggregates weremelted together and the CdS aggregate size did not change in the UCBD-CdS thin films after theCdCl2-treatment procedure. It is interesting that the ratio of the horizontal to vertical deposition rate variedwith deposition time over the deposition period of the UCBD-CdS thin films. The deposition time was veryimportant to obtain large CdS aggregate grains and dense UCBD-CdS thin films. Over a deposition time of40 min the resulting UCBD-CdS thin films were dense and had a 180 nm grain size of CdS aggregates anda 80.8 nm of thin film thickness. The large-grained and dense UCBD-CdS thin films were suitable for thinfilm solar cells as a window layer.