CAJ | 학술논문

三坐标测量机的高精度模拟接触式探头在计算探头球尖位移与传感器输出的关系时需要空间坐标转换模型与标定参数.标定方法基于自己研发的模拟接触式探头,该探头由带有光纤球头的的金属丝悬浮机构,二维角度传感器,小型迈克尔逊干涉仪组成.通过空间坐标转换,矩阵计算模型和标定实验的建立,重点描述了一种特定的标定方法与标定了模型的未知参数.实验结果表明三坐标测量机在x、y、z三方向上测量的标定值与实际值的位移误差的标准差小于30 nm,证明该方法具有一定的可行性与有效性.
삼좌표측량궤적고정도모의접촉식탐두재계산탐두구첨위이여전감기수출적관계시수요공간좌표전환모형여표정삼수.표정방법기우자기연발적모의접촉식탐두,해탐두유대유광섬구두적적금속사현부궤구,이유각도전감기,소형매극이손간섭의조성.통과공간좌표전환,구진계산모형화표정실험적건립,중점묘술료일충특정적표정방법여표정료모형적미지삼수.실험결과표명삼좌표측량궤재x、y、z삼방향상측량적표정치여실제치적위이오차적표준차소우30 nm,증명해방법구유일정적가행성여유효성.
High-precision analogue contact probe for Micro/Nano-Coordinate Measurement Machines (CMM)requires modeling and calibration parameters when calculating the displacement of the ball tip with respect to the sensors' output.This paper presents the transformation model which is based on the self-developed analogue contact probe,and the probe is composed of a fiber stylus with ball tip,a mechanism with wire-suspended floating plate,a two-dimensional angle sensor and a miniature Michelson interferometer.Trough space coordinate transformation,the matrix computational model and the calibration experiment,the emphasis is upon the description of the specific calibration method and the calibration of unknown parameters.The calibration experiment results show that the standard deviation of the error between calibration values and actual values in x,y,z axes are bellow 30nm,and the feasibility and effectiveness of the calibration method have been proved by the experiment.