CAJ | 학술논문

随着近代高新技术的发展，要求各种探测器微型化。微加工技术的进步，使得微器件制造有了可能，于是微传感器就应运而生了。微热板作为一种微型加热器在微传感器中有着极为重要的作用。它的温度分布和热特性直接影响微传感器的工作性能，为此微热板的热测试和热分析成为微传感器的研制、使用和评价所必不可少的工作。本文针对研制中的气体传感器的微热板，用红外热成像技术进行热测试和分析，获得气体传感器微热板的微小区域的温度分布，为传感器的研制提供了可靠的依据。
수착근대고신기술적발전，요구각충탐측기미형화。미가공기술적진보，사득미기건제조유료가능，우시미전감기취응운이생료。미열판작위일충미형가열기재미전감기중유착겁위중요적작용。타적온도분포화열특성직접영향미전감기적공작성능，위차미열판적열측시화열분석성위미전감기적연제、사용화평개소필불가소적공작。 본문침대연제중적기체전감기적미열판，용홍외열성상기술진행열측시화분석，획득기체전감기미열판적미소구역적온도분포，위전감기적연제제공료가고적의거。
With the development of high technology, sensors become more and more small.The progress in micro-fabrication technology enables devices to be miniaturized.As a micro-heater, the micro-hotplate is a very important component in micro-sensor.Its temperature distribution and thermal characteristics directly determine the micro-sensor's behavior, thus, thermal measurement and analysis ofmicro-hotplate become an indispensable step in the design, application and evaluation of micro-sensors. 　　In this paper, infrared thermograph is applied in the thermal analysis and measurement of micro-hotplate of a gas sensor. The temperature distribution of small area of micro-hotplate is measured, which provide a reliable basis for the development of micro-sensor.