CAJ | 학술논문

从硫酸钛Ti(SO_4)_2的水溶液出发,采用化学浴沉积和电沉积法来制备图案化TiO_2薄膜.通过硫酸和双氧水来稳定Ti~(4+),配制了pH=1.0的硫酸钛溶液和pH=1.6的过氧硫酸钛溶液.结合微接触印刷术在硅基底上制得自组装膜预图案,再化学浴沉积TiO_2即可得规则图纹.无机配体对钛溶液的稳定性和TiO_2的晶型均有影响,溶液的酸度关系到所得图案的质量.过氧硫酸钛溶液同样适用于电沉积,在导电玻璃基底上旋涂光刻胶后选择性曝光、显影,通过控制阴极电位可获得高差达200 nm的清晰图案.
종류산태Ti(SO_4)_2적수용액출발,채용화학욕침적화전침적법래제비도안화TiO_2박막.통과류산화쌍양수래은정Ti~(4+),배제료pH=1.0적류산태용액화pH=1.6적과양류산태용액.결합미접촉인쇄술재규기저상제득자조장막예도안,재화학욕침적TiO_2즉가득규칙도문.무궤배체대태용액적은정성화TiO_2적정형균유영향,용액적산도관계도소득도안적질량.과양류산태용액동양괄용우전침적,재도전파리기저상선도광각효후선택성폭광、현영,통과공제음겁전위가획득고차체200 nm적청석도안.
TiO_2 thin films were patterned from an aqueous solution containing Ti(SO_4)_2 by chemical bath deposition and electrochemical deposition methods. Two titanium precursors were prepared, a titanium sulfate solution (pH=1.0)and a peroxotitanium sulfate solution (pH=1.6), and these solutions were stabilized by sulfuric acid and hydrogen peroxide, respectively. Pre-patterned self-assembled monolayers (SAMs) were micro-contact printed on silicon substrates and were then immersed in the chemical bath for deposition to obtain the ordered TiO_2 patterns. The inorganic ligands affect the solution stability and the crystallinity of the TiO_2 films. The aqueous acidity affected the quality of the patterned films. A peroxotitanium sulfate solution was also used for patterning on the conductive glass of indium tin oxide by electrodeposition. The photoresist was ready for deposition after spin-coating, exposure, and development. Finally, clear patterns with a height of 200 nm were fabricated by controlling the cathode potential.