磁控溅射C靶电流对Cr/C和Cr/C/N复合镀层组织和性能的影响
자공천사C파전류대Cr/C화Cr/C/N복합도층조직화성능적영향
Effects of C Current on Microstructures and Properties of Magnetron Sputtered Cr/C and Cr/C/N Composite Coatings
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