CAJ | 학술논문

在不同组成比的高纯Ar和N2气氛下，用RF溅射纯铁制备成不同含氮量的FexN (1.6<x<2.2)。用质子深度弹性散射对样品中的Fe、N、O、C进行分析，X光电子谱仪用于鉴定铁的氧化程度。采用穆斯堡尔效应测量室温时和经200、250、300℃退火的样品。对照X衍射实验结果表明，在铁的化学计量接近2时，随氮气氛的增加，或者经退火处理后，其相结构会从正交结构的ζ-Fe2N向密堆六方结构的ε-Fe2N或准ZnS相结构转化。在ε-Fe2N相中铁原子的第一近邻呈现贫氮或富氮的现象。
재불동조성비적고순Ar화N2기분하，용RF천사순철제비성불동함담량적FexN (1.6<x<2.2)。용질자심도탄성산사대양품중적Fe、N、O、C진행분석，X광전자보의용우감정철적양화정도。채용목사보이효응측량실온시화경200、250、300℃퇴화적양품。대조X연사실험결과표명，재철적화학계량접근2시，수담기분적증가，혹자경퇴화처리후，기상결구회종정교결구적ζ-Fe2N향밀퇴륙방결구적ε-Fe2N혹준ZnS상결구전화。재ε-Fe2N상중철원자적제일근린정현빈담혹부담적현상。
Under different atmospheric environment composed of pure Ar and N2, a serial of FexN (1.6<x<2.2) samples were made by RF sputtering. Proton depth elastic scattering was adopted to measure Fe, N, O and C, XPS was used to detect the oxidation of iron. Mɑssbauer spectroscopy was used to analyze the samples as sputtered and annealed after 200℃, 250℃ and 300℃. Combined with X-ray diffraction, the results show that: when the ratio of Fe:N is close to 2, its phase structure will undergo a transition from orthogonal ζ-Fe2N and ε-Fe2N-Fe3N to hcp ε-Fe2N, while the first neighbor of Fe atom may be rich of or lack of N. When the nitrogen content is increased during sputtering, or the samples are annealed, Fe2N phase will transform into quasi-ZnS structure.