CAJ | 학술논문

大多数气体分子在3～5 μm的中红外区都有基本振动吸收谱带,采用中红外半导体光电子器件进行气体浓度的检测,具有灵敏度高、准确性好,稳定、可靠等优点.TracePro软件是一套普遍用于杂散光分析、照明系统分析以及光学系统分析的光线设计和仿真软件.采用TracePro软件设计了一个用于中红外气体检测系统的反射式双光程结构,并采用TracePro软件对光学设计进行了仿真与分析.通过TracePro的分析检查出设计中存在的缺陷与不足,对设计进行调整与修改,得到最优化的光学结构.
대다수기체분자재3～5 μm적중홍외구도유기본진동흡수보대,채용중홍외반도체광전자기건진행기체농도적검측,구유령민도고、준학성호,은정、가고등우점.TracePro연건시일투보편용우잡산광분석、조명계통분석이급광학계통분석적광선설계화방진연건.채용TracePro연건설계료일개용우중홍외기체검측계통적반사식쌍광정결구,병채용TracePro연건대광학설계진행료방진여분석.통과TracePro적분석검사출설계중존재적결함여불족,대설계진행조정여수개,득도최우화적광학결구.
Most gas molecules have the fundamental vibration absorb spectrum in the mid-infrared region during 3 ～ 5 μm. Detecting the gas concentration using the mid-infrared semiconductor opto-electronic devices have more advantages, such as high sensitivity, high accuracy and stability etc. The optical software TracePro is a simulation and analysis tool that performs stray light analysis,illumination analysis,and optical systems analysis. This paper designs a dual path structure using TracePro for mid-infrared gas sensing system. Using TracePro to simulate and analyze this optical design and modify the design according the analysis report.