CAJ | 학술논문

介绍了硅电容式加速度传感器的工作原理和制作过程。传感器的敏感元件为一个差分电容器，它是由活动质量块与两个玻璃极板通过阳极键合形成。活动质量块用标准的双极工艺和各向异性腐蚀工艺制作。该传感器的量程为20?gn，线性度为10－4量级。
개소료규전용식가속도전감기적공작원리화제작과정。전감기적민감원건위일개차분전용기，타시유활동질량괴여량개파리겁판통과양겁건합형성。활동질량괴용표준적쌍겁공예화각향이성부식공예제작。해전감기적량정위20?gn，선성도위10－4량급。
The fundamental principle and fabricating process of a silicon capacitive accelerometer are described. The sensing element consists of a differential capacitor which is formed by a movable mass and two electrodes situated on anodically bonded glass plates. The application of a standard bipolar process allows the movable mass to be realized by anisotropic wet etching.The non-linearity of 10-4 magnitude is reached under a range of 20 gn.