CAJ | 학술논문

随着高新技术的迅速发展，许多研究对象已进入亚微米和纳米范畴。在对这些对象的热性能和热可靠性的研究中，亚微米尺度的热物性测量已成为关键技术之一。例如：在微电子、微电子机械系统(MEMS)领域中，已使用纳米量级厚度的材质和做出纳米尺度线宽的器件。在材料科学、生物学、医学和化学等许多领域，高空间分辨率下的热物性测量也具有重要意义。
수착고신기술적신속발전，허다연구대상이진입아미미화납미범주。재대저사대상적열성능화열가고성적연구중，아미미척도적열물성측량이성위관건기술지일。례여：재미전자、미전자궤계계통(MEMS)영역중，이사용납미량급후도적재질화주출납미척도선관적기건。재재료과학、생물학、의학화화학등허다영역，고공간분변솔하적열물성측량야구유중요의의。
The application of scanning thermal microscope (SThM) in measurements of the thermal conductivity distribution, and then, the non-uniformity of materials on a micro-scale has been discussed. The thermal image obtained by SThM showed the thermal conductivity contrast of a silicon-silicon dioxide sample on a micrometer scale. The principle used to measure the thermal diffusivity and conductivity with high lateral resolution by SThM is proposed.