CAJ | 학술논문

利用负偏压增强热丝化学气相沉积在不同的负偏压和压强下,在沉积有不同厚度NiFe膜的Si衬底上制备了碳纳米管,并用扫描电子显微镜研究了它们的生长.发现在无辉光放电的情况下,碳纳米管弯曲生长,而在辉光放电时,碳纳米管准直生长,表明辉光放电对碳纳米管的准直生长起到了重要的作用.由于辉光放电的产生,在衬底表面附近形成很强的电场.相对无辉光放电时的电场,场强提高了两个数量级.本工作详细地研究了辉光放电对碳纳米管的准直生长作用.
이용부편압증강열사화학기상침적재불동적부편압화압강하,재침적유불동후도NiFe막적Si츤저상제비료탄납미관,병용소묘전자현미경연구료타문적생장.발현재무휘광방전적정황하,탄납미관만곡생장,이재휘광방전시,탄납미관준직생장,표명휘광방전대탄납미관적준직생장기도료중요적작용.유우휘광방전적산생,재츤저표면부근형성흔강적전장.상대무휘광방전시적전장,장강제고료량개수량급.본공작상세지연구료휘광방전대탄납미관적준직생장작용.
Carbon nanotubes were synthesized on silicon substrates coated with NiFe films of different thickness by negative bias-enhanced hot filament chemical vapor deposition at different negative bias and pressure, and their growth was investigated by scanning electron microscopy. It was found that the bent and aligned carbon nanotubes are respectively grown without and with glow discharge, indicating that glow discharge plays an important role for alignment growth of carbon nanotubes. Due to occurrence of glow discharge, a strong electric filed is established near the substrate, where its strength relative to the field without glow discharge can be enhanced two order of the magnitude. In the work, the effect of glow discharge on alignment growth of carbon nanotubes was studied in detail.