华南理工大学学报(自然科学版)
華南理工大學學報(自然科學版)
화남리공대학학보(자연과학판)
JOURNAL OF SOUTH CHINA UNIVERSITY OF TECHNOLOGY(NATURAL SCIENCE EDITION)
2009年
12期
7-11
,共5页
王周锋%黄立%高爱梅%邓文礼
王週鋒%黃立%高愛梅%鄧文禮
왕주봉%황립%고애매%산문례
光纤探针%化学腐蚀%近场光学显微镜%表面形貌
光纖探針%化學腐蝕%近場光學顯微鏡%錶麵形貌
광섬탐침%화학부식%근장광학현미경%표면형모
fiber probe%chemical etching%near-field scanning optical microscope%surface morphology
采用改进的Turner法制备近场光学显微镜光纤探针,考察了外界因素、腐蚀溶液及保护液体系性质等对探针形貌的影响,并与管式腐蚀方法制备的光纤探针的形貌进行了对比,对Turner法制备光纤探针的工艺进行了改进.结果表明:升高反应温度可明显提高反应速度,温度由0℃升至32℃时,反应速度增加1.6倍;腐蚀溶液浓度越高,制备的探针锥长越短、表面越粗糙;适当延长反应时间可增大探针的锥角;Turner法制备光纤探针时探针锥面蜂窝状粗糙形貌是光纤探针成尖过程的本质缺陷造成的;采用第二次修饰性腐蚀可以有效地改进探针的粗糙锥面,并增大探针的圆锥角.
採用改進的Turner法製備近場光學顯微鏡光纖探針,攷察瞭外界因素、腐蝕溶液及保護液體繫性質等對探針形貌的影響,併與管式腐蝕方法製備的光纖探針的形貌進行瞭對比,對Turner法製備光纖探針的工藝進行瞭改進.結果錶明:升高反應溫度可明顯提高反應速度,溫度由0℃升至32℃時,反應速度增加1.6倍;腐蝕溶液濃度越高,製備的探針錐長越短、錶麵越粗糙;適噹延長反應時間可增大探針的錐角;Turner法製備光纖探針時探針錐麵蜂窩狀粗糙形貌是光纖探針成尖過程的本質缺陷造成的;採用第二次脩飾性腐蝕可以有效地改進探針的粗糙錐麵,併增大探針的圓錐角.
채용개진적Turner법제비근장광학현미경광섬탐침,고찰료외계인소、부식용액급보호액체계성질등대탐침형모적영향,병여관식부식방법제비적광섬탐침적형모진행료대비,대Turner법제비광섬탐침적공예진행료개진.결과표명:승고반응온도가명현제고반응속도,온도유0℃승지32℃시,반응속도증가1.6배;부식용액농도월고,제비적탐침추장월단、표면월조조;괄당연장반응시간가증대탐침적추각;Turner법제비광섬탐침시탐침추면봉와상조조형모시광섬탐침성첨과정적본질결함조성적;채용제이차수식성부식가이유효지개진탐침적조조추면,병증대탐침적원추각.
Fiber probes for near-field scanning optical microscope were fabricated using the improved Turner me-thod. Then, the morphology of the probes affected by such parameters as the environment factor and the characte-ristics of the etchant and the cover layer was investigated and compared with that of the probes fabricated via the tube etching. Moreover, the process of the Turner method was modified. The results indicate that (1) the reaction speed greatly increases with the reaction temperature, and an temperature increase from 0℃ to 32℃ may accelerate the reaction by 1.6 times;(2) with the increase of etching solution concentration, the taper length becomes shorter and the surface becomes rougher;(3) a suitable long reaction time may increase the taper angle of the probes;(4) the rough honeycomb taper surface of the probes is due to the inherent limitation of the taper-forming process;and (5) a second etching effectively smoothes the taper surface and enlarges the taper angle.