电子学报
電子學報
전자학보
ACTA ELECTRONICA SINICA
2010年
2期
393-398
,共6页
金珠%温志渝%张智海%黄尚廉
金珠%溫誌渝%張智海%黃尚廉
금주%온지투%장지해%황상렴
微机电系统%光栅光调制器%控制系统电路%静态随机存储器
微機電繫統%光柵光調製器%控製繫統電路%靜態隨機存儲器
미궤전계통%광책광조제기%공제계통전로%정태수궤존저기
MEMS%GLM%control system circuits%SRAM
提出一种基于静态随机存储器(SRAM)的光栅光调制器阵列控制系统电路.介绍了光栅光调制器的加工工艺和工作原理,分析了该控制系统电路的原理和技术指标.利用Cadence软件和尤锡华润上华0.5μm工艺,设计和加工了大小为8×8的控制系统电路.通过实验表明:加工的SRAM有源矩阵单元能够实现对输出电压的更新或保持:且加工的控制系统电路能够实现对光栅光调制器阵列的有源控制,从逻辑功能上验证了该控制系统电路设计的正确性.结果表明:只要该控制系统电路的行、列驱动电路能够在248NHz的时钟频率下工作,且有源矩阵单元的开关时间小于121ns,则该控制系统电路可以满足分辨率为1920×1080,帧频为30Hz,灰度级为256的投影显示.
提齣一種基于靜態隨機存儲器(SRAM)的光柵光調製器陣列控製繫統電路.介紹瞭光柵光調製器的加工工藝和工作原理,分析瞭該控製繫統電路的原理和技術指標.利用Cadence軟件和尤錫華潤上華0.5μm工藝,設計和加工瞭大小為8×8的控製繫統電路.通過實驗錶明:加工的SRAM有源矩陣單元能夠實現對輸齣電壓的更新或保持:且加工的控製繫統電路能夠實現對光柵光調製器陣列的有源控製,從邏輯功能上驗證瞭該控製繫統電路設計的正確性.結果錶明:隻要該控製繫統電路的行、列驅動電路能夠在248NHz的時鐘頻率下工作,且有源矩陣單元的開關時間小于121ns,則該控製繫統電路可以滿足分辨率為1920×1080,幀頻為30Hz,灰度級為256的投影顯示.
제출일충기우정태수궤존저기(SRAM)적광책광조제기진렬공제계통전로.개소료광책광조제기적가공공예화공작원리,분석료해공제계통전로적원리화기술지표.이용Cadence연건화우석화윤상화0.5μm공예,설계화가공료대소위8×8적공제계통전로.통과실험표명:가공적SRAM유원구진단원능구실현대수출전압적경신혹보지:차가공적공제계통전로능구실현대광책광조제기진렬적유원공제,종라집공능상험증료해공제계통전로설계적정학성.결과표명:지요해공제계통전로적행、렬구동전로능구재248NHz적시종빈솔하공작,차유원구진단원적개관시간소우121ns,칙해공제계통전로가이만족분변솔위1920×1080,정빈위30Hz,회도급위256적투영현시.
A control system circuits based on static random access memory(SRAM) for grating light modulator (GLM) ar-ray is proposed in this paper. The process and operating principle of the GLM are introduced. The operating principle and technique parameters of the control system circuits are analyzed. With Cadence software and CSMC's 0.5μm process, a 8×8 control system circuits is designed and fabricated. The experimental results indicate that the output vohage can be refreshed or hold by the active matrix addressing based on SRAM; and the GLM can be controlled well by the fabricated control system circuits, which confirms the functional correctness of the designed control system circuits. The result incticates that if both the row and column driving circuits can work well in 248MHz clock frequency and the switch time of the active matrix unite is less than 121ns, this designed control system circuits can be applied in projection display which has 1920 × 1080 resolution, 30Hz frame frequency and 256 grayscale.