CAJ | 학술논문

利用射频辉光放电法，通过周期性交替切换两种耦合电极的方式，制备了μc-Si∶H/a-Si∶H多层膜．低角度X射线衍射(LAXRD)测试表明，这种多层膜具有良好的周期性结构．观察了上述多层膜的光学性质及电导率与温度的关系，发现其吸收边随着a-Si∶H层的减薄而蓝移，低温下的电导激活能Ea随着a-Si∶H层的减薄而减小
이용사빈휘광방전법，통과주기성교체절환량충우합전겁적방식，제비료μc-Si∶H/a-Si∶H다층막．저각도X사선연사(LAXRD)측시표명，저충다층막구유량호적주기성결구．관찰료상술다층막적광학성질급전도솔여온도적관계，발현기흡수변수착a-Si∶H층적감박이람이，저온하적전도격활능Ea수착a-Si∶H층적감박이감소
μc-Si∶H/a-Si∶H multilayers have been prepared with RF glow-discharge method in which two types of coupling electrodes are alternately changed periodically.The perfect periodic structure of the samples is determined by low-angle X-ray diffraction.The optical properties and temperature dependence on conductivity of the multilayers were observed.It is found that,as the thickness of a-Si∶H sublayer decreases,the optical gap of multilayer increases and the activation energy of conductivity decreases in low temperatures.Above results have been discussed.