CAJ | 학술논문

提出了一种基于数字微反射镜(DMD)微光刻的导光模板的制作方法.导光板的网点单元图形由DMD输入,经过缩微光学成像系统缩微后,在光刻胶干板上逐单元网点曝光,再经过显影、微电铸得到导光板模板,在PC薄板材上用微纳米压印制成导光板,厚度仅为0.381 mm.采用自行研制的SVGwriting-DMD激光直写系统,图形的最小分辨率为2 μm,DMD微光刻法无需掩膜版,可实现不同形状、大小、微结构的单元网点图形及网点的排布,便于大幅面的导光板模板的制作.
제출료일충기우수자미반사경(DMD)미광각적도광모판적제작방법.도광판적망점단원도형유DMD수입,경과축미광학성상계통축미후,재광각효간판상축단원망점폭광,재경과현영、미전주득도도광판모판,재PC박판재상용미납미압인제성도광판,후도부위0.381 mm.채용자행연제적SVGwriting-DMD격광직사계통,도형적최소분변솔위2 μm,DMD미광각법무수엄막판,가실현불동형상、대소、미결구적단원망점도형급망점적배포,편우대폭면적도광판모판적제작.
A flexible and efficient solution for fabricating the ultra-thin light guided plates (LGP) is presented. The approach is based on maskless lithography which is realized by the aid of a digital micro-mirror device (DMD). The image of microstructures created by DMD is projected by passing through a projection optical system to the substrate with a photoresist layer. After exposure, development and electroforming, a nickel template with patterned microstructures is obtained and can be used to fabricate LGP by hot embossing. The proposed method has the advantages of arbitrary microstructures created by DMD lithography and costeffective mass production by embossing replication. A fabricated LGP with thickness down to 0.381 mm was demonstrated, in which the microstructures have the resolution of 2 μm. The process provides a effective scheme for fabricating large format LGP with more complex microstructures.