CAJ | 학술논문

采用2维自洽完全流体模型,数值研究了阳极为通孔的高气压微腔放电结构中等离子体参数的变化过程.模拟结果获得了当氩气压强为13.3 kPa时,放电中的电势分布、等离子体密度分布、径向电场分布和电子温度分布等重要参数的演化过程.模拟结果表明在放电过程中,阴极附近的电场由轴向电场逐步转变为径向电场,等离子体密度最大值位于放电腔中间处,并随时间推移由阳极附近向阴极附近移动,电子温度的最大值出现在阴极环形鞘层区域.
채용2유자흡완전류체모형,수치연구료양겁위통공적고기압미강방전결구중등리자체삼수적변화과정.모의결과획득료당아기압강위13.3 kPa시,방전중적전세분포、등리자체밀도분포、경향전장분포화전자온도분포등중요삼수적연화과정.모의결과표명재방전과정중,음겁부근적전장유축향전장축보전변위경향전장,등리자체밀도최대치위우방전강중간처,병수시간추이유양겁부근향음겁부근이동,전자온도적최대치출현재음겁배형초층구역.
The evolution of plasma parameters during high pressure discharge in the microcavity with a hollow anode was numerically studied,with a two-dimensional self-consistent fluid model.The simulations were performed with argon at 13.3 kPa.The numerical results show that during the discharge the electric field around the cathode transforms from an axial field to a radial field,the plasma density gets the maximum value on the central line of the cavity and the location of the maximum density moves from the region near anode at the initial stage to the cathode vicinity at the stable stage,and the maximum electron temperature occurs in the ring sheath of cathode.