CAJ | 학술논문

提出了一种新型的双轴电容式微机械加速度计的结构形式.采用1个质量块敏感2个正交方向的加速度,设计的弹性支撑结构巧妙地实现了正交方向的解耦,且结构稳定性好.详细讨论了该加速度计的工作原理,并利用有限元软件对敏感结构进行了静态和模态分析,从理论上验证了所提出的双轴电容式微机械加速度计整体结构的可行性.
제출료일충신형적쌍축전용식미궤계가속도계적결구형식.채용1개질량괴민감2개정교방향적가속도,설계적탄성지탱결구교묘지실현료정교방향적해우,차결구은정성호.상세토론료해가속도계적공작원리,병이용유한원연건대민감결구진행료정태화모태분석,종이론상험증료소제출적쌍축전용식미궤계가속도계정체결구적가행성.
A novel structure of dual-axis capacitive micromachined accelerometer is introduced. A proof mass is sensitive to two orthogonal accelerations. The full symmetry structure with comb fingers makes cleverly the decoupling of two orthogonal accelerations and has high stability. After discussing the work principle of this element,the modality and static analysis are used by ANSYS. The results show that the structure can fulfill the design demands in theory.