功能材料
功能材料
공능재료
JOURNAL OF FUNCTIONAL MATERIALS
2009年
7期
1104-1107,1111
,共5页
范茂彦%姜胜林%谢甜甜%张洋洋%张丽芳
範茂彥%薑勝林%謝甜甜%張洋洋%張麗芳
범무언%강성림%사첨첨%장양양%장려방
红外%新型sol-gel技术%LNo/Pt复合底电极%夹层厚膜%介电增强
紅外%新型sol-gel技術%LNo/Pt複閤底電極%夾層厚膜%介電增彊
홍외%신형sol-gel기술%LNo/Pt복합저전겁%협층후막%개전증강
infrared%new sol-gel process%LNO/Pt composite bottom electrode%interlining thick film%dielectric rein-forcement
以钡、锶和锰醋酸盐为原料,采用新型溶胶-凝胶法制备锰掺杂4%mol、Ba/Sr分别为60/40、65/35和70/30的纳米粉体,均匀分散于组分相同的BST溶胶中,形成稳定的厚膜先体凝胶.浓度0.4mol/L钛酸钡凝胶薄膜种子层,作为不同组分厚膜之间的中间夹层.利用旋转涂覆工艺在LNO/Pt/Ti/SiO2/Si复合底电极上,制备出厚度约为6~10μm的BST介电增强型夹层厚膜.XRD测试结果表明,650℃热处理2h后的夹层厚膜为单一钙钛矿相,750℃热处理后2h的夹层厚膜在室温、环境温度25℃、频率1kHz下相对介电常数εγ和介质损耗tanδ分别约为1200和0.03,室温25℃附近较宽范围介温变化率>1.2%/℃,BST夹层厚膜无裂纹出现,表面平整,致密,是制备大阵列非制冷红外焦平面阵列(UFPA)的优选材料.
以鋇、鍶和錳醋痠鹽為原料,採用新型溶膠-凝膠法製備錳摻雜4%mol、Ba/Sr分彆為60/40、65/35和70/30的納米粉體,均勻分散于組分相同的BST溶膠中,形成穩定的厚膜先體凝膠.濃度0.4mol/L鈦痠鋇凝膠薄膜種子層,作為不同組分厚膜之間的中間夾層.利用鏇轉塗覆工藝在LNO/Pt/Ti/SiO2/Si複閤底電極上,製備齣厚度約為6~10μm的BST介電增彊型夾層厚膜.XRD測試結果錶明,650℃熱處理2h後的夾層厚膜為單一鈣鈦礦相,750℃熱處理後2h的夾層厚膜在室溫、環境溫度25℃、頻率1kHz下相對介電常數εγ和介質損耗tanδ分彆約為1200和0.03,室溫25℃附近較寬範圍介溫變化率>1.2%/℃,BST夾層厚膜無裂紋齣現,錶麵平整,緻密,是製備大陣列非製冷紅外焦平麵陣列(UFPA)的優選材料.
이패、송화맹작산염위원료,채용신형용효-응효법제비맹참잡4%mol、Ba/Sr분별위60/40、65/35화70/30적납미분체,균균분산우조분상동적BST용효중,형성은정적후막선체응효.농도0.4mol/L태산패응효박막충자층,작위불동조분후막지간적중간협층.이용선전도복공예재LNO/Pt/Ti/SiO2/Si복합저전겁상,제비출후도약위6~10μm적BST개전증강형협층후막.XRD측시결과표명,650℃열처리2h후적협층후막위단일개태광상,750℃열처리후2h적협층후막재실온、배경온도25℃、빈솔1kHz하상대개전상수εγ화개질손모tanδ분별약위1200화0.03,실온25℃부근교관범위개온변화솔>1.2%/℃,BST협층후막무렬문출현,표면평정,치밀,시제비대진렬비제랭홍외초평면진렬(UFPA)적우선재료.
The stable precursor gel of thick film is formed by uniform dispersion of nano-powder into the BST sol. The nano-powder is obtained by a new sobgel method by means of 4mol% Mn doping,with Ba,Sr and man-ganese acetate as raw materials. In addition, Ba/Sr ratio is 60/40,65/35 and 70/30, respectively. The BST thin film of with 0.4mol/L concentration is used to be the interlining between the thick films with different compo-nents. The BST dielectric-reinforced interlining thick film of around 6-10μm thickness is made in the composite LNO/Pt/Ti/SiO2/Si bottom electrode by spin-coating process. The XRD measurement shows that the interlin-ing thick film by 2h heating treatment at 650℃ is a single perovskite phase. The relative dielectric constant εγand dielectric loss tan δ of the interlining thick film by two-hour heating treatment at 700℃ are approximately 1200 and 0. 03 in the case of 25℃ and lkHz, respectively. The dielectric-temperature change rate is over 1.2%/℃ within a wide range near 25℃. The surface of BST interlining thick film is very smooth and compact without any fracture. Thus, the BST interlining thick film is seen as the preferable material for large UFPA.