CAJ | 학술논문

以聚乙稀醇(PVA)水溶液为溶剂,采用液相法制备了高度c轴取向的ZnO薄膜.采用XRD、Raman以及AFM分析了退火温度与涂层厚度对ZnO薄膜的影响.结果表明,随着退火温度的提高,ZnO薄膜的结晶度及其均方根粗糙度有所提高;同时厚度的增加使得ZnO薄膜的单一取向性减弱.其生长机理可表述为:在每一层涂层中一致或不一致的成核同时产生,通过层内与层间晶粒的聚合、联并,最后形成具有(002)取向的柱状与颗粒状并存的ZnO连续膜.
이취을희순(PVA)수용액위용제,채용액상법제비료고도c축취향적ZnO박막.채용XRD、Raman이급AFM분석료퇴화온도여도층후도대ZnO박막적영향.결과표명,수착퇴화온도적제고,ZnO박막적결정도급기균방근조조도유소제고;동시후도적증가사득ZnO박막적단일취향성감약.기생장궤리가표술위:재매일층도층중일치혹불일치적성핵동시산생,통과층내여층간정립적취합、련병,최후형성구유(002)취향적주상여과립상병존적ZnO련속막.
Highly c-axis oriented zinc oxide (ZnO) thin films were prepared by CSD with polyvinyl alcohol (PVA).The effect of annealing temperature and coating thickness on the ZnO thin films was characterized by XRD,Raman and AFM.It was shown that crystallinity and the root-mean-square of these thin films were enhanced with increasing annealing temperature in some degree.Meanwhile,the c-axial orientation of the ZnO films decreased with increasing the coating thickness.Growth mechanism can be described as follows:homogeneous and heterogeneous nucleation happened simultaneously in each layer while heating the coated films,and once the grains got into contact with neighboring one,coarsening occurred in each direction.As the coarsening process continued,the grain sizes became larger and continuous ZnO(002) films with columnar and granular structure can be obtained at last.