光学精密工程
光學精密工程
광학정밀공정
OPTICS AND PRECISION ENGINEERING
2001年
1期
10-13
,共4页
鱼卫星%卢振武%王鹏%WENG Zhi-cheng
魚衛星%盧振武%王鵬%WENG Zhi-cheng
어위성%로진무%왕붕%WENG Zhi-cheng
耦合波%亚波长%多层增透膜
耦閤波%亞波長%多層增透膜
우합파%아파장%다층증투막
为解决光学系统中普遍存在的菲涅耳反射问题,利用严格耦合波法设计、分析了一种三维轮廓亚波长结构,然后把计算结果同多层反射膜的增透特性进行了比较,结果表明该结构在很宽的波段上尤其是远红外波段上的抗反射特性要远远好于多层膜,其反射率基本上能控制在0.2%以内;并且这种结构反射率的变化随入射光波入射角的偏离在40°以内能保持在1%以下,而多层膜只能在30°以内勉强做到这一点。
為解決光學繫統中普遍存在的菲涅耳反射問題,利用嚴格耦閤波法設計、分析瞭一種三維輪廓亞波長結構,然後把計算結果同多層反射膜的增透特性進行瞭比較,結果錶明該結構在很寬的波段上尤其是遠紅外波段上的抗反射特性要遠遠好于多層膜,其反射率基本上能控製在0.2%以內;併且這種結構反射率的變化隨入射光波入射角的偏離在40°以內能保持在1%以下,而多層膜隻能在30°以內勉彊做到這一點。
위해결광학계통중보편존재적비열이반사문제,이용엄격우합파법설계、분석료일충삼유륜곽아파장결구,연후파계산결과동다층반사막적증투특성진행료비교,결과표명해결구재흔관적파단상우기시원홍외파단상적항반사특성요원원호우다층막,기반사솔기본상능공제재0.2%이내;병차저충결구반사솔적변화수입사광파입사각적편리재40°이내능보지재1%이하,이다층막지능재30°이내면강주도저일점。
To solve the Fresnel reflection which exits generally in optical systems, we designed and analyzed one kind of structures, subwavelength surface-relief periodic structures, which have three-dimension profile, using the coupled wav e method. Then comparing the calculated results with the characteristics of multilayer antireflection coatings, it was found that this subwavelength periodic structure is far more efficient than multilayer antireflection coating in a wide wave band, particularly in infrared wave band, and the reflection ratio can be controlled in 0.2% in general. Besides this, the variety of reflection of this subwavelength periodic structure can be maintained in 1% when incident angle of incident wave has a 40° deflection, while for multilayer antireflection coatings, it ju st can do this in 30°.