中国光学快报(英文版)
中國光學快報(英文版)
중국광학쾌보(영문판)
CHINESE JOURNAL OF LASERS
2004年
1期
4-6
,共3页
孙晓慧%周常河%茹华一%张妍妍%余昺鲲
孫曉慧%週常河%茹華一%張妍妍%餘昺鯤
손효혜%주상하%여화일%장연연%여병곤
We report a laser writing system for fabrication of diffractive optical elements with He-Cd laser. The wavelength of the light source is 441.6 nm. The output beam is collimated into parallel light with uniform intensity distribution after passing through the spatial filter with a pinhole of 25μm and the collimating device. A microscopy objective lens with numerical aperture (NA) of 0.65 is used to focus the beam into a small diffraction spot. Any pattern can be written with this system. Experimental results are presented.The written gratings and the phase patterns were verified with a conventional optical microscopy and the Taylor Hobson equipment.
