CAJ | 학술논문

由于硫化锌(ZnS)晶体透光区域较宽,常被用于多波段可见与红外光学系统中.介绍了在ZnS基底上制备的多波段光学薄膜,在400-700 nm的可见波段及8～12μm的中长波红外波段实现高透射率,在1 064nm及1540 nm两点实现高反射率,其入射角度为45°.选取了ZnS和YbF_3作为高低折射率材料,设计并通过软件优化出合理的膜系,采用电子枪离子辅助沉积系统进行镀制.该薄膜能够承受雨淋、盐雾、高低温等环境测试,满足使用要求.这对于红外光学系统的应用具有极其重要的意义.
유우류화자(ZnS)정체투광구역교관,상피용우다파단가견여홍외광학계통중.개소료재ZnS기저상제비적다파단광학박막,재400-700 nm적가견파단급8～12μm적중장파홍외파단실현고투사솔,재1 064nm급1540 nm량점실현고반사솔,기입사각도위45°.선취료ZnS화YbF_3작위고저절사솔재료,설계병통과연건우화출합리적막계,채용전자창리자보조침적계통진행도제.해박막능구승수우림、염무、고저온등배경측시,만족사용요구.저대우홍외광학계통적응용구유겁기중요적의의.
ZnS crystal is usually used in multi-band visible and IR optical systems because of its wide transmission wavelength region. The preparation of multi-band optical film on a ZnS substrate was mainly introduced. At incident angle of 45°, high transmittance over visible band from 400 nm to 700 nm and middle-long wavelength IR band from 8 μm to 12 μm, high reflectivity at the two wavelengths of 1 064 nm and 1 540 nm were implemented. ZnS and YbF_3 were respectively used as high and low refraction index material. The proper film was designed and optimized with software. The thin film was deposited with IBS. The deposited coating can endure the environmental tests such as rain pour, salt fog, and high and low temperature etc. and meet its practical requirement. It has important significance for the application of infrared optical systems.