激光与红外
激光與紅外
격광여홍외
LASER & INFRARED
2010年
1期
44-47
,共4页
黄峰%贾文武%汪岳峰%尚浩%郭双飞
黃峰%賈文武%汪嶽峰%尚浩%郭雙飛
황봉%가문무%왕악봉%상호%곽쌍비
激光光束整形%激光匀束器%多孔径光束积分器%微透镜阵列
激光光束整形%激光勻束器%多孔徑光束積分器%微透鏡陣列
격광광속정형%격광균속기%다공경광속적분기%미투경진렬
laser beam shaping%laser beam homogenizer%multi-aperture beam integrator%microlens arrays
分析了多孔径光束积分匀束器的基本原理和设计理论,分别设计了衍射型和成像型微透镜阵列激光匀束器,将高斯光束整形为平顶光束.光线追迹的结果表明,当微透镜阵列的菲涅尔数较大时,两种匀束器都能获得良好的匀束效果,而成像型能比前者提供更好的光束均匀性和边缘坡度.此外,入射光的准直性能会影响匀束效果,当入射光发散角较大,超过微透镜数值孔径时会导致像面光斑出现明显旁瓣,无法实现正常的匀化.
分析瞭多孔徑光束積分勻束器的基本原理和設計理論,分彆設計瞭衍射型和成像型微透鏡陣列激光勻束器,將高斯光束整形為平頂光束.光線追跡的結果錶明,噹微透鏡陣列的菲涅爾數較大時,兩種勻束器都能穫得良好的勻束效果,而成像型能比前者提供更好的光束均勻性和邊緣坡度.此外,入射光的準直性能會影響勻束效果,噹入射光髮散角較大,超過微透鏡數值孔徑時會導緻像麵光斑齣現明顯徬瓣,無法實現正常的勻化.
분석료다공경광속적분균속기적기본원리화설계이론,분별설계료연사형화성상형미투경진렬격광균속기,장고사광속정형위평정광속.광선추적적결과표명,당미투경진렬적비열이수교대시,량충균속기도능획득량호적균속효과,이성상형능비전자제공경호적광속균균성화변연파도.차외,입사광적준직성능회영향균속효과,당입사광발산각교대,초과미투경수치공경시회도치상면광반출현명현방판,무법실현정상적균화.
The principle and design theory of multi-aperture beam integration homogenizer are analyze.Diffracting and imaging microlens array laser beam homogenizers are designed to convert Gaussian beams into top-hat beams.The raytracing simulations show that both of them have good uniformity when the Fresnel-Number of microlens array is big,and imaging types give better uniformity and edge steepness than former.The collimation of incident beam has influence on beam uniformity.The big divergence of incident beam which exceeds the NA of microlens results in the side-lobe on the image plane,then the beam uniformity can′t be realized.