CAJ | 학술논문

介绍了一款杆式旋转超声电机,它由一个定子和两个转子构成,利用两个一阶弯曲振动模态工作。将该电机应用于驱动精密定位平台,并构建了基于计算机与GO-400运动控制器的精密定位平台控制系统。对于杆式超声电机,当利用专用驱动器供电,驱动器的输入电压为直流15V时,电机的空载转速为206r/min,堵转力矩为0.273N.m。对于精密定位平台,通过对电机进行正/反转控制、速度PID控制,实现平台的精密定位,定位精度达到2μm。进行了平台步进试验,其正/反向的位移分辨力都为1μm。利用旋转超声电机作精密定位系统的致动器时,可以采用旋转型光电编码器代替昂贵的直线型编码器,从而大大降低整个精密定位系统的价格。
개소료일관간식선전초성전궤,타유일개정자화량개전자구성,이용량개일계만곡진동모태공작。장해전궤응용우구동정밀정위평태,병구건료기우계산궤여GO-400운동공제기적정밀정위평태공제계통。대우간식초성전궤,당이용전용구동기공전,구동기적수입전압위직류15V시,전궤적공재전속위206r/min,도전력구위0.273N.m。대우정밀정위평태,통과대전궤진행정/반전공제、속도PID공제,실현평태적정밀정위,정위정도체도2μm。진행료평태보진시험,기정/반향적위이분변력도위1μm。이용선전초성전궤작정밀정위계통적치동기시,가이채용선전형광전편마기대체앙귀적직선형편마기,종이대대강저정개정밀정위계통적개격。
A rod shape rotary ultrasonic motor utilizing the first bending vibration mode was provided,which was composed of one stator and two rotors.The motor was applied for the actuator of a precision positioning stage.A control system for the stage was designed based on computer and GO-400 motion controller.The motor was driven by an ultrasonic motor driver.When the applied voltage to one electric port was fixed at 15V,the motor speed without load was 206r/min and the maximum load torque was 0.273N·m.It is confirmed that the ultrasonic motor is suitable for achieving precise positioning of the stage with forward/reverse control and speed PID control.It is proved by experimental results that the positioning errors of the stage is less than 2μm and forward/reverse displacement resolutions of 1μm are achieved.The precision positioning stage driven by rotary type ultrasonic motors can use rotary optical encoders instead of expensive linear optical encoders.Thus,the price of precision positioning system can be significantly reduced.