稀有金属材料与工程
稀有金屬材料與工程
희유금속재료여공정
RARE METAL MATERIALS AND ENGINEERNG
2006年
z2期
137-140
,共4页
许佳玲%孙会元%杨素娟%封顺珍%苏振访%胡骏%于红云
許佳玲%孫會元%楊素娟%封順珍%囌振訪%鬍駿%于紅雲
허가령%손회원%양소연%봉순진%소진방%호준%우홍운
FePt/Ti颗粒膜%对靶磁控溅射系统%磁记录介质
FePt/Ti顆粒膜%對靶磁控濺射繫統%磁記錄介質
FePt/Ti과립막%대파자공천사계통%자기록개질
FePt/Ti granular films%facing-target magnetron sputtering system%magnetic recording media
在室温下,应用对靶直流磁控溅射设备在普通玻璃基片上制备了FePt(30nm)/Ti(tnm)颗粒膜样品,随后,在真空中进行了原位退火.详细研究了Ti衬底层对FePt颗粒膜的微结构和磁特性的影响.X射线衍射图谱表明样品形成了较有序的L10织构,Ti和FePt形成了三元FePtTi合金.当Ti层厚度t=5 nm、退火温度Ta=500℃时,样品具有高度有序的L10织构、小的颗粒尺寸和优异的磁特性.矫顽力超过了6.7 kOe,饱和磁化强度为620emu/cc.并且具有较小的开关场分布.结果表明FePt/Ti颗粒膜系统可作为超高密度磁记录介质的候选者.
在室溫下,應用對靶直流磁控濺射設備在普通玻璃基片上製備瞭FePt(30nm)/Ti(tnm)顆粒膜樣品,隨後,在真空中進行瞭原位退火.詳細研究瞭Ti襯底層對FePt顆粒膜的微結構和磁特性的影響.X射線衍射圖譜錶明樣品形成瞭較有序的L10織構,Ti和FePt形成瞭三元FePtTi閤金.噹Ti層厚度t=5 nm、退火溫度Ta=500℃時,樣品具有高度有序的L10織構、小的顆粒呎吋和優異的磁特性.矯頑力超過瞭6.7 kOe,飽和磁化彊度為620emu/cc.併且具有較小的開關場分佈.結果錶明FePt/Ti顆粒膜繫統可作為超高密度磁記錄介質的候選者.
재실온하,응용대파직류자공천사설비재보통파리기편상제비료FePt(30nm)/Ti(tnm)과립막양품,수후,재진공중진행료원위퇴화.상세연구료Ti츤저층대FePt과립막적미결구화자특성적영향.X사선연사도보표명양품형성료교유서적L10직구,Ti화FePt형성료삼원FePtTi합금.당Ti층후도t=5 nm、퇴화온도Ta=500℃시,양품구유고도유서적L10직구、소적과립척촌화우이적자특성.교완력초과료6.7 kOe,포화자화강도위620emu/cc.병차구유교소적개관장분포.결과표명FePt/Ti과립막계통가작위초고밀도자기록개질적후선자.
FePt (30 nm)/Ti (t nm)granular films were prepared by DC facing-target magnetron sputtering system onto glass substrates at room temperature and subsequently in situ annealed in vacuum. The influence of Ti on microstructural and magnetic properties of the FePt films was investigated in detail. X-ray diffraction (XRD) patterns indicate that the films deposited onto glass substrates with the addition of Ti layer form a ternary FePtTi alloy possessing L10 texture. The film with perfectly ordered L10 structure was obtained at t = 5 nm and Ta = 500 ℃, which had ultra-small grain size and unique magnetic properties. The maximum coercivity and saturation magnetization reached more than 6.7×7.96×104A.m-1 and 620emu/cc,respectively. The small switching field distribution (SFD) was obtained. The results showed that this system might be applicable to ultra-high-density magnetic recording media.