仪器仪表学报
儀器儀錶學報
의기의표학보
CHINESE JOURNAL OF SCIENTIFIC INSTRUMENT
2001年
2期
154-157
,共4页
张景和%廖江红%刘伟%冯晓国
張景和%廖江紅%劉偉%馮曉國
장경화%료강홍%류위%풍효국
二元光学元件%激光直写设备%临界角法
二元光學元件%激光直寫設備%臨界角法
이원광학원건%격광직사설비%림계각법
本文介绍了二元光学元件制作的基本情况,国外制作二元光学元件设备的发展情况及国内制作二元光学元件设备的现状。重点介绍了长春光机所研制的二元光学元件激光直接写入设备中机械总体方面的主要关键技术,给出了导轨、传动系统、回转轴系、调焦伺服机构的主要技术指标和完成情况。另外还介绍了临界角法的调焦原理及实现光学调焦的调焦机构。
本文介紹瞭二元光學元件製作的基本情況,國外製作二元光學元件設備的髮展情況及國內製作二元光學元件設備的現狀。重點介紹瞭長春光機所研製的二元光學元件激光直接寫入設備中機械總體方麵的主要關鍵技術,給齣瞭導軌、傳動繫統、迴轉軸繫、調焦伺服機構的主要技術指標和完成情況。另外還介紹瞭臨界角法的調焦原理及實現光學調焦的調焦機構。
본문개소료이원광학원건제작적기본정황,국외제작이원광학원건설비적발전정황급국내제작이원광학원건설비적현상。중점개소료장춘광궤소연제적이원광학원건격광직접사입설비중궤계총체방면적주요관건기술,급출료도궤、전동계통、회전축계、조초사복궤구적주요기술지표화완성정황。령외환개소료림계각법적조초원리급실현광학조초적조초궤구。
The paper describes the development state of manufacturing binaryoptical element's equipment in abroad and the present situation of it in home. It explains mainly essential techniques on the mechanical overall aspect on binary optical element's laser direct lithography equipment which has been manufactured by us. Simultaneous, it still gives the essential technology indexes and development state of slideway, transmission systems, round journal and focusing servo. The paper also introduces the focusing principle of critical angle and focusing mechanism of achieving optical focusing.