一种远程、多点、实时的洁净度监测系统设计
일충원정、다점、실시적길정도감측계통설계
Design of A Long-distance and Multi Point Real-time Monitoring System for the Cleanliness
  • 万方数据
    宇航计测技术 우항계측기술
    JOURNAL OF ASTRONAUTIC METROLOGY AND MEASUREMENT
    2009年 6期 41-44,40 ,共5页

    季启政%顾世红%陈建%何玉俊

    계계정%고세홍%진건%하옥준

    洁净度%监测系统%设计%散射 潔淨度%鑑測繫統%設計%散射
    길정도%감측계통%설계%산사
    Cleanliness%Monitoring system%Design%Scattering
    为了满足各类实验室不断提高的洁净度监测实时性要求, 设计了一种可远程控制、可实时监测、可多点监测、可集中显示、可分析数据的洁净度监测系统.
    위료만족각류실험실불단제고적길정도감측실시성요구, 설계료일충가원정공제、가실시감측、가다점감측、가집중현시、가분석수거적길정도감측계통.
    In order to meet the needs of various laboratories continue to improve the real-time monitoring requirements for the cleanliness, a cleanliness monitoring system are designed, which can long-distance control, can be real-time monitoring, can be multi point monitoring, can focus on the display, can analyze data.
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