CAJ | 학술논문

采用空气等离子体基离子注入技术对Ti6Al4V合金进行了表面改性.注入负脉冲电压分别为10 kV,30 kV,50 kV,注入剂量为0.6×10~(17)ions/cm~2.用X射线光电子能谱仪对注入层元素分布进行了分析,结果表明:改性层的外层为TiO_2,外层与内层基体之间存在Ti_2O_3、TiO、TiN;采用球盘磨损试验机对注入层的摩擦学性能进行了研究.结果表明:随着注入电压的增加,摩擦因数减小,耐磨性能提高.且以50 kV注空气最为显著,摩擦因数较基体降低了3倍多,磨损体积与比磨损率较基体均下降了1个数量级以上.注入层硬度比基材Ti6Al4V也有明显提高.
채용공기등리자체기리자주입기술대Ti6Al4V합금진행료표면개성.주입부맥충전압분별위10 kV,30 kV,50 kV,주입제량위0.6×10~(17)ions/cm~2.용X사선광전자능보의대주입층원소분포진행료분석,결과표명:개성층적외층위TiO_2,외층여내층기체지간존재Ti_2O_3、TiO、TiN;채용구반마손시험궤대주입층적마찰학성능진행료연구.결과표명:수착주입전압적증가,마찰인수감소,내마성능제고.차이50 kV주공기최위현저,마찰인수교기체강저료3배다,마손체적여비마손솔교기체균하강료1개수량급이상.주입층경도비기재Ti6Al4V야유명현제고.
The surface modified layer on Ti6Al4V alloy by air plasma based ion implantation at plused voltages ?10kV, ?30kV, ?50kV was studied by X?ray photoeletron spectroscopy (XPS).The implantation is up to 0.6×10~(17)ions/cm~2 does. The results showed that: The oxide layer is predominantly TiO_2, which contains a small TiO、Ti_2O_3 and TiN between the outmost layer and metallic substrate. Tribological performance of ion implantation layer was investigated by a ball on disk sliding wear machine. The results indicated that the coefficient of friction is decreased and the wear resistance is increased with the increasing of voltage. The sample of air implantation at pulsed voltage-50kV is most remarkable, the friction coefficient is decreased 3 time as that of the original Ti6Al4V alloy, and the wear volume and wear rate is decreased over an order of magnitude. Compared to the substrate, the surface hardness of the treated sample also improved significantly.