中国有色金属学报（英文版）
中國有色金屬學報（英文版）
중국유색금속학보（영문판）
TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA
2012年
6期
1381-1386
,共6页
高功率等离子磁控溅射%金属-类金刚石碳膜%类金刚石碳膜
高功率等離子磁控濺射%金屬-類金剛石碳膜%類金剛石碳膜
고공솔등리자자공천사%금속-류금강석탄막%류금강석탄막
high-power plasma-sputtering%Me-DLC%diamond-like carbon
为了改善类金刚石碳膜的性能,采用高功率等离子磁控溅射法将含钛非晶碳薄膜沉积在304不锈钢基材上,气源为C2H2-Ar混合气体,金属钛为阴极靶材.为了改善附着力和降低残余应力,制备了含Ti/TiC/DLC多层结构的镀膜.利用GDS、XRD、SEM、Raman光谱法、纳米压痕仪和盘-销摩擦计研究基材偏压及基材与靶材的距离对薄膜性能的影响.结果表明,薄膜具有优良的粘合强度和韧性.
為瞭改善類金剛石碳膜的性能,採用高功率等離子磁控濺射法將含鈦非晶碳薄膜沉積在304不鏽鋼基材上,氣源為C2H2-Ar混閤氣體,金屬鈦為陰極靶材.為瞭改善附著力和降低殘餘應力,製備瞭含Ti/TiC/DLC多層結構的鍍膜.利用GDS、XRD、SEM、Raman光譜法、納米壓痕儀和盤-銷摩抆計研究基材偏壓及基材與靶材的距離對薄膜性能的影響.結果錶明,薄膜具有優良的粘閤彊度和韌性.
위료개선류금강석탄막적성능,채용고공솔등리자자공천사법장함태비정탄박막침적재304불수강기재상,기원위C2H2-Ar혼합기체,금속태위음겁파재.위료개선부착력화강저잔여응력,제비료함Ti/TiC/DLC다층결구적도막.이용GDS、XRD、SEM、Raman광보법、납미압흔의화반-소마찰계연구기재편압급기재여파재적거리대박막성능적영향.결과표명,박막구유우량적점합강도화인성.
To improve the characteristics of a diamond-like carbon (DLC) film,Ti-containing amorphous hydrogenated carbon thin films were deposited on sus304 stainless steel substrates by high-power plasma-sputtering with titanium metal as the solid plasma source in a mixed ArC2H2 atmosphere.The films were fabricated to obtain a multilayered structure of Ti/TiC/DLC gradient for improving adhesion and reducing residual stress.The effects of substrate bias and target-substrate distance on the films' properties were studied by glow discharge spectroscope,X-ray diffractometer,Raman spectroscope,nanoindenter,and a pin-on-disk tribometer.The results indicate that the films possess superior adhesive strength and toughness.
