CAJ | 학술논문

根据某θFXZ型特定结构测量机,研究其静力及动力变形误差的系统分析方法.在建立测量机非刚体数学模型的基础上,求解测量机由于力变形带来的测量误差值,并用激光干涉仪对测量机静力及动力状态下的误差分别进行了测量.利用所建立的数学模型对测量机存在的静力变形带来的测量误差进行补偿,使立柱在水平方向的偏摆带来的最大测量误差由补偿前的10.2μm减小到1.0 μm.实验得到的动力状态变形结果可以用于测量机力变形误差补偿技术的进一步研究.
근거모θFXZ형특정결구측량궤,연구기정력급동력변형오차적계통분석방법.재건립측량궤비강체수학모형적기출상,구해측량궤유우력변형대래적측량오차치,병용격광간섭의대측량궤정력급동력상태하적오차분별진행료측량.이용소건립적수학모형대측량궤존재적정력변형대래적측량오차진행보상,사립주재수평방향적편파대래적최대측량오차유보상전적10.2μm감소도1.0 μm.실험득도적동력상태변형결과가이용우측량궤력변형오차보상기술적진일보연구.
According to the structural characteristics of the coordinate measuring machine with θFXZ structure,a systematic analysis method of its errors induced by static and dynamic forces has been proposed. Based on the non-rigid body model of the measuring machine,its force-induced measuring errors were theoretically calculated and then measured with a laser inter-ferometer under static deformation and dynamic deformation. Furthermore,with compensation of the measured error induced by static force using the mathematical model,the maximum error of the column deformation in X direction was reduced from 10.2 μm to 1.0 μm. Results of the dynamic deformation obtained from the experiment can be applied to further studies of force-induced errors of the measuring machine.