CAJ | 학술논문

基于微孔测量中测头不能做得足够小的技术难题,文中提出采用标准多模通信光纤,按特定的工艺技术方法烧熔光纤测球,再进行封装制成测头,应用在微孔测量中.重点介绍了这种测头的技术参数和成形方法、原理,并对研制的φ0.1 mm光纤测头几何形貌进行实际测量,应用于φ0.6 mm小孔孔径的测量分析,标准偏差不超过0.5μm,取得了很好应用效果.
기우미공측량중측두불능주득족구소적기술난제,문중제출채용표준다모통신광섬,안특정적공예기술방법소용광섬측구,재진행봉장제성측두,응용재미공측량중.중점개소료저충측두적기술삼수화성형방법、원리,병대연제적φ0.1 mm광섬측두궤하형모진행실제측량,응용우φ0.6 mm소공공경적측량분석,표준편차불초과0.5μm,취득료흔호응용효과.
Based on the fact that probe tips can not be fabricated small enough to measure the small hole diameter. A new optical-mechanical fiber probe was presented. The probe is fabricated from standard multi-mode communicate optical Gbers, its very small probe tip is formed using a series of instruments and tools and then it was used to measure small size hole. The probe tips formed method and principle and technical specification were introduced. The fiber probe tips geographic properties with a φ 0. 1 mm diameter was measured and analyised. After that , the fiber probe is used to measure a φ 0.6 mm small hole diameter and get a 0.5 μm standard deviation results, It shows the fiber probe is adapted to measure the small holes.